Patents Assigned to GlobolFoundries Inc.
  • Polishing head using zone control
    Patent number: 7905764
    Abstract: A polishing head for a chemical mechanical polishing apparatus is provided which includes at least two polishing head zones configured to provide different temperatures for transferring heat to at least two zones of a substrate corresponding to the at least two polishing head zones. The present disclosure addresses chemical mechanical polishing which allows a control of the polishing profile even if slurries are used, which show almost no dependency between polishing rate and down force.
    Type: Grant
    Filed: March 10, 2008
    Date of Patent: March 15, 2011
    Assignee: GlobolFoundries Inc.
    Inventors: Jens Heinrich, Gerd Marxsen