Abstract: There is provided a glow discharge mass spectroscope having a higher analytical sensitivity by increasing an amount of extracted ion beams without a significant change in device construction and drive conditions of conventional glow discharge systems.

Abstract: There is provided a glow discharge mass spectroscope having a higher analytical sensitivity by increasing an amount of extracted ion beams without a significant change in device construction and drive conditions of conventional glow discharge systems. An extraction plate 25 that is disposed at an ion extraction port of a discharge cell 20 and functions as an extraction electrode includes a first plate 26 that has a projection 26a projected toward a discharge region 27 in an opening 25a and that is disposed on the discharge region 27 side, and a second plate 28 that is connected to the first plate 26 in an outer circumferential edge and that is disposed with a gap provided between the first plate 26 and the second plate 28.

Abstract: There is provided a glow discharge mass spectroscope having a higher analytical sensitivity by increasing an amount of extracted ion beams without a significant change in device construction and drive conditions of conventional glow discharge systems.