Abstract: Provided is a method for manufacturing a coil unit that is suited to the bulk manufacturing of multiple sets of coil parts for a multi-axis linear motor actuator. This method of manufacturing a coil unit for a multi-axis linear motor actuator, which is constituted by disposing multiple sets of linear shaft motors 10 in a line at a prescribed pitch, includes: a step in which a coil fixing member 50 is prepared that holds receiving parts 51 that are capable of receiving multiple coil parts 15, which are equal in quantity to the multiple sets of linear shaft motors, with the coil parts being arranged in a line at the prescribed pitch; a step in which the multiple coil parts are disposed by being arranged in a line and secured to the coil fixing member; and a step in which electromagnetic shielding plates 70 that are longer than the coil parts are disposed along a center axis direction at locations corresponding to the spaces between at least adjacent coil parts among the multiple coil parts disposed in the line.

Abstract: The present invention provides a linear motor device that can reduce a variation in thrust caused by a variation in attractive force. The linear motor device includes a linear motor 1 and a control section 30 that controls the linear motor 1. The linear motor 1 includes a magnet member 2 composed of permanent magnets having respective N poles and S poles alternately arranged in an axial direction, and a coil member 3 which is located orthogonally to the axial direction with respect to the magnet member 2 and through which the magnet member 2 is movable in the axial direction relative to the coil member 3. The control section 30 controls current conducted through the coil member 3 so that a moving one of the magnet member 2 and the coil member 3 reciprocates within a use range L corresponding to a part of a pitch p between the magnetic poles N and S in the magnet member 2.

Abstract: The present invention provides a linear motor 1 that can prevent a magnet member 2 from falling down when a power supply is turned off. A linear motor 1 includes a magnet member 2 composed of permanent magnets having alternately arranged respective N poles and S poles and a coil member 3 which surrounds a periphery of the magnet member 2 and trough which the magnet member 2 is movable in an axial direction relative to the coil member 3. A magnetic substance 3 is provided in the vicinity of one end of the coil member 3 to allow the magnet member 2 to exert a magnetic attractive force.

Abstract: A coating apparatus 10 includes a base 11, a substrate support stage unit 2 mounted on the base 11 and capable of fixedly supporting a substrate 1, a coating unit 3 mounted on the base 11 and capable of discharging a coating material onto a substrate 1 fixedly supported on the substrate support stage unit 2, and a motor unit 4 for driving at least either the substrate support stage unit 2 or the coating unit 3 for sliding on the base 11. The motor unit 3 has a stator assembly 22 on the base 11. The stator assembly 22 includes a plurality of magnets 31 linearly arranged such that opposite magnetic polarities of the magnets alternately change, and a pair of magnet holding members 37 and 38 for linearly pressing the magnets 31 together from both the ends of the magnets.

Abstract: The present invention provides a linear motor 1 that can prevent a magnet member 2 from falling down when a power supply is turned off. A linear motor 1 includes a magnet member 2 composed of permanent magnets having alternately arranged respective N poles and S poles and a coil member 3 which surrounds a periphery of the magnet member 2 and trough which the magnet member 2 is movable in an axial direction relative to the coil member 3. A magnetic substance 3 is provided in the vicinity of one end of the coil member 3 to allow the magnet member 2 to exert a magnetic attractive force.

Abstract: The present invention provides a linear motor device that can reduce a variation in thrust caused by a variation in attractive force. The linear motor device includes a linear motor 1 and a control section 30 that controls the linear motor 1. The linear motor 1 includes a magnet member 2 composed of permanent magnets having respective N poles and S poles alternately arranged in an axial direction, and a coil member 3 which is located orthogonally to the axial direction with respect to the magnet member 2 and through which the magnet member 2 is movable in the axial direction relative to the coil member 3. The control section 30 controls current conducted through the coil member 3 so that a moving one of the magnet member 2 and the coil member 3 reciprocates within a use range L corresponding to a part of a pitch p between the magnetic poles N and S in the magnet member 2.

Abstract: A coating apparatus 10 includes a base 11, a substrate support stage unit 2 mounted on the base 11 and capable of fixedly supporting a substrate 1, a coating unit 3 mounted on the base 11 and capable of discharging a coating material onto a substrate 1 fixedly supported on the substrate support stage unit 2, and a motor unit 4 for driving at least either the substrate support stage unit 2 or the coating unit 3 for sliding on the base 11. The motor unit 3 has a stator assembly 22 on the base 11. The stator assembly 22 includes a plurality of magnets 31 linearly arranged such that opposite magnetic polarities of the magnets alternately change, and a pair of magnet holding members 37 and 38 for linearly pressing the magnets 31 together from both the ends of the magnets.