Patents Assigned to GMEMS TECH SHENZHEN LIMITED
  • Patent number: 12075222
    Abstract: The present invention provides a process of fabricating a capacitive microphone such as a MEMS microphone with two capacitors. The two capacitors may be so fabricated that the signal output from the first capacitor is additive inverse of that from the second capacitor, and a total signal output is a difference between the two outputs. In at least one of the two capacitors, a movable or deflectable membrane/diaphragm moves in a lateral manner relative to the fixed capacitor plate, instead of moving toward/from the fixed plate. The squeeze film damping, and the noise are substantially avoided, and the performances of the microphone are significantly improved.
    Type: Grant
    Filed: July 9, 2021
    Date of Patent: August 27, 2024
    Assignee: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan, Zhixiong Xiao
  • Patent number: 12075223
    Abstract: The present invention provides a process of fabricating a capacitive microphone such as a MEMS microphone with two capacitors. The two capacitors may be so fabricated that the signal output from the first capacitor is additive inverse of that from the second capacitor, and a total signal output is a difference between the two outputs. In at least one of the two capacitors, a movable or deflectable membrane/diaphragm moves in a lateral manner relative to the fixed capacitor plate, instead of moving toward/from the fixed plate. The squeeze film damping, and the noise are substantially avoided, and the performances of the microphone are significantly improved.
    Type: Grant
    Filed: July 9, 2021
    Date of Patent: August 27, 2024
    Assignee: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan, Zhixiong Xiao
  • Patent number: 12069455
    Abstract: The present invention provides a process for fabricating a capacitive microphone such as a MEMS microphone. In the microphone, a movable or deflectable membrane/diaphragm may be so fabricated that it moves in a lateral manner relative to a fixed backplate, instead of moving toward/from the fixed backplate. The fixed backplate may be so fabricated that it includes an electrical insulator sandwiched between two sub-conductors to cancel systematic/background noise. The squeeze film damping is substantially avoided, and the performance, such as signal to noise ratio, of the fabricated microphone is significantly improved.
    Type: Grant
    Filed: June 19, 2021
    Date of Patent: August 20, 2024
    Assignee: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan
  • Publication number: 20240053179
    Abstract: A micromachined capacitive flow sensor includes a movable membrane having one or more venting holes and a perforated backplate having perforation holes or through holes. A gas gap (such as an air gap) is formed between the movable membrane and the perforated backplate. The movable membrane, the gas gap and the perforated backplate form a variable capacitor whose capacitance varies with a movement of the membrane relative to the perforated backplate. The sensor may be used to manufacture a packaged flow sensor product which may find numerous applications, for example, using the product as a switch to turn on and off the electric power to the heating elements of the aerosol delivery device in response to the puff and/or smoking action of the user.
    Type: Application
    Filed: December 12, 2022
    Publication date: February 15, 2024
    Applicant: GMEMS TECH SHENZHEN LIMITED
    Inventors: Yunlong Wang, Guanghua Wu, Maoxiang Guo
  • Patent number: 11818542
    Abstract: The present invention provides a MEMS microphone comprising (i) a substrate layer, (ii) a fixed backplate, and (iii) an intermediate layer sandwiched between the substrate layer and the fixed backplate. The substrate layer has a first opening through the thickness of the substrate layer. The intermediate layer has a second opening through the thickness of the intermediate layer. The fixed backplate forms a ceiling of the second opening, and the second opening is larger than the first opening and extends into the first opening, forming a looped recess (“undercut”). The looped recess is defined by a looped ledge on the substrate, a looped sidewall around the second opening, and a looped ceiling from the fixed backplate. The looped sidewall and the looped ceiling are made of a same material.
    Type: Grant
    Filed: September 21, 2021
    Date of Patent: November 14, 2023
    Assignee: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan, Zhixiong Xiao
  • Patent number: 11765534
    Abstract: The present invention provides a capacitive microphone such as a MEMS microphone with two capacitors. The signal output from the first capacitor is additive inverse of that from the second capacitor, and a total signal output is a difference between the two outputs. In at least one of the two capacitors, a movable or deflectable membrane/diaphragm moves in a lateral manner relative to the fixed capacitor plate, instead of moving toward/from the fixed plate. The squeeze film damping, and the noise are substantially avoided, and the performances of the microphone is significantly improved.
    Type: Grant
    Filed: December 13, 2020
    Date of Patent: September 19, 2023
    Assignee: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan, Zhixiong Xiao
  • Patent number: 11765533
    Abstract: The present invention provides a capacitive microphone such as a MEMS microphone with two capacitors. The signal output from the first capacitor is additive inverse of that from the second capacitor, and a total signal output is a difference between the two outputs. In at least one of the two capacitors, a movable or deflectable membrane/diaphragm moves in a lateral manner relative to the fixed capacitor plate, instead of moving toward/from the fixed plate. The squeeze film damping, and the noise are substantially avoided, and the performances of the microphone is significantly improved.
    Type: Grant
    Filed: December 13, 2020
    Date of Patent: September 19, 2023
    Assignee: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan, Zhixiong Xiao
  • Patent number: 11601763
    Abstract: The present invention provides a capacitive microphone including a MEMS microphone. In the microphone, a movable or deflectable membrane/diaphragm moves in a lateral manner relative to a fixed backplate, instead of moving toward/from the fixed backplate. The fixed backplate includes an electrical insulator sandwiched between two sub-conductors to cancel systematic/background noise. The squeeze film damping is substantially avoided, and the performance, such as signal to noise ratio, of the microphone is significantly improved.
    Type: Grant
    Filed: May 28, 2020
    Date of Patent: March 7, 2023
    Assignee: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan
  • Patent number: 11546711
    Abstract: The present invention provides a process of fabricating a capacitive microphone such as a MEMS microphone. In the process, one electrically conductive layer is deposited on a removable layer, and then divided or cut into two divided layers, both of which remain in contact with the removable layer as they were. One of the two divided layers will become or include a movable or deflectable membrane/diaphragm that moves in a lateral manner relative to another layer, instead of moving toward/from another layer. A motional sensor is optionally fabricated within the microphone to estimate the noise introduced from acceleration or vibration of the microphone for the purpose of compensating the microphone output through a signal subtraction operation.
    Type: Grant
    Filed: September 1, 2020
    Date of Patent: January 3, 2023
    Assignee: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan
  • Patent number: 11496820
    Abstract: The present invention provides a general MEMS device having a pair of quadrilateral insert and trench. An air channel/space includes a first internal wall and a second internal wall for air to flow between. A quadrilateral trench is recessed from the first internal wall, and a quadrilateral insert is extended from the second internal wall and inserted into the trench. In capacitive MEMS microphone, the spatial relationship between the insert and the trench can vary or oscillate. The quadrilateral insert & trench serve as an air flow restrictor or a leakage prevention structure which keeps the sound frequency response plot of the microphone flatter in the range of 20 Hz to 1000 Hz. The level of the air resistance may be controlled e.g. by the depth of quadrilateral trench/slot etched on the substrate.
    Type: Grant
    Filed: March 25, 2021
    Date of Patent: November 8, 2022
    Assignee: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan
  • Publication number: 20210345054
    Abstract: The present invention provides a process of fabricating a capacitive microphone such as a MEMS microphone with two capacitors. The two capacitors may be so fabricated that the signal output from the first capacitor is additive inverse of that from the second capacitor, and a total signal output is a difference between the two outputs. In at least one of the two capacitors, a movable or deflectable membrane/diaphragm moves in a lateral manner relative to the fixed capacitor plate, instead of moving toward/from the fixed plate. The squeeze film damping, and the noise are substantially avoided, and the performances of the microphone are significantly improved.
    Type: Application
    Filed: July 9, 2021
    Publication date: November 4, 2021
    Applicant: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan, Zhixiong Xiao
  • Publication number: 20210337333
    Abstract: The present invention provides a process of fabricating a capacitive microphone such as a MEMS microphone with two capacitors. The two capacitors may be so fabricated that the signal output from the first capacitor is additive inverse of that from the second capacitor, and a total signal output is a difference between the two outputs. In at least one of the two capacitors, a movable or deflectable membrane/diaphragm moves in a lateral manner relative to the fixed capacitor plate, instead of moving toward/from the fixed plate. The squeeze film damping, and the noise are substantially avoided, and the performances of the microphone are significantly improved.
    Type: Application
    Filed: July 9, 2021
    Publication date: October 28, 2021
    Applicant: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan, Zhixiong Xiao
  • Publication number: 20210314718
    Abstract: The present invention provides a process for fabricating a capacitive microphone such as a MEMS microphone. In the microphone, a movable or deflectable membrane/diaphragm may be so fabricated that it moves in a lateral manner relative to a fixed backplate, instead of moving toward/from the fixed backplate. The fixed backplate may be so fabricated that it includes an electrical insulator sandwiched between two sub-conductors to cancel systematic/background noise. The squeeze film damping is substantially avoided, and the performance, such as signal to noise ratio, of the fabricated microphone is significantly improved.
    Type: Application
    Filed: June 19, 2021
    Publication date: October 7, 2021
    Applicant: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan
  • Publication number: 20210211793
    Abstract: The present invention provides a general MEMS device having a pair of quadrilateral insert and trench. An air channel/space includes a first internal wall and a second internal wall for air to flow between. A quadrilateral trench is recessed from the first internal wall, and a quadrilateral insert is extended from the second internal wall and inserted into the trench. In capacitive MEMS microphone, the spatial relationship between the insert and the trench can vary or oscillate. The quadrilateral insert & trench serve as an air flow restrictor or a leakage prevention structure which keeps the sound frequency response plot of the microphone flatter in the range of 20 Hz to 1000 Hz. The level of the air resistance may be controlled e.g. by the depth of quadrilateral trench/slot etched on the substrate.
    Type: Application
    Filed: March 25, 2021
    Publication date: July 8, 2021
    Applicant: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan
  • Patent number: 10993044
    Abstract: The present invention provides a MEMS device such as a capacitive MEMS microphone that comprises a new design of air flow restrictor having a pair of continuous looped insert and trench. An air channel/space includes a first internal wall and a second internal wall for air to flow between. A continuous looped trench is recessed from the first internal wall, and a continuous looped insert is extended from the second internal wall and inserted into the trench. The spatial relationship between the insert and the trench can vary or oscillate. Air resistance of the channel/space may be controlled by the trench's depth. The invention has a significant effect on, for example, keeping the sound frequency response plot more flat on the low frequency part ranging from 20 Hz to 1000 Hz.
    Type: Grant
    Filed: December 2, 2019
    Date of Patent: April 27, 2021
    Assignee: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan
  • Publication number: 20210058727
    Abstract: The present invention provides a process of fabricating a capacitive microphone such as a MEMS microphone. In the process, one electrically conductive layer is deposited on a removable layer, and then divided or cut into two divided layers, both of which remain in contact with the removable layer as they were. One of the two divided layers will become or include a movable or deflectable membrane/diaphragm that moves in a lateral manner relative to another layer, instead of moving toward/from another layer. A motional sensor is optionally fabricated within the microphone to estimate the noise introduced from acceleration or vibration of the microphone for the purpose of compensating the microphone output through a signal subtraction operation.
    Type: Application
    Filed: September 1, 2020
    Publication date: February 25, 2021
    Applicant: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan
  • Patent number: 10798508
    Abstract: The present invention provides a process of fabricating a capacitive microphone such as a MEMS microphone. In the process, one electrically conductive layer is deposited on a removable layer, and then divided or cut into two divided layers, both of which remain in contact with the removable layer as they were. One of the two divided layers will become or include a movable or deflectable membrane/diaphragm that moves in a lateral manner relative to another layer, instead of moving toward/from another layer. A motional sensor is optionally fabricated within the microphone to estimate the noise introduced from acceleration or vibration of the microphone for the purpose of compensating the microphone output through a signal subtraction operation.
    Type: Grant
    Filed: October 12, 2017
    Date of Patent: October 6, 2020
    Assignee: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan
  • Patent number: 10715928
    Abstract: The present invention provides a capacitive microphone having a capability of acceleration noise cancelation. The microphone includes (1) a moveable functional membrane comprising a basic functional membrane with an area Ao; and (2) a moveable reference membrane comprising a basic reference membrane. The basic reference membrane has one or more holes through the membrane's thickness, and the moveable reference membrane would be identical to the moveable functional membrane if the basic reference membrane does not have said one or more holes. The total area of said one or more holes is Ah, and a hole density HD is defined as Ah/Ao (%), and HD is in the range of e.g. from 0.012% to 2.647%.
    Type: Grant
    Filed: February 7, 2019
    Date of Patent: July 14, 2020
    Assignee: GMEMS TECH SHENZHEN LIMITED
    Inventors: Guanghua Wu, Xingshuo Lan, Yunlong Wang