Abstract: A device model parameter generation system, comprises a user module, for obtaining parameter set configurations and measurement data of devices; a parameter extraction module, for performing parameter extractions on the parameter set configurations and the measurement data, to generate a parameter set; a simulation module, for performing simulations according to the parameter set configurations and the measurement data, to generate a simulation results; an analysis module, for determining whether the devices conform to a trend according to the parameter set, to generate a first determination result, and for determining whether the devices conform to a smoothness according to the first determination result and the parameter set, to generate a second determination result; and a device model parameter generation module, for generating a device model parameters according to the second determination result and the parameter set.