Patents Assigned to GOERTEKMICROELECTRONICS CO., LTD.
  • CAPACITIVE MEMS MICROPHONE, MICROPHONE UNIT AND ELECTRONIC DEVICE
    Publication number: 20230353951
    Abstract: Disclosed in embodiments of the present disclosure are a capacitive MEMS microphone, a microphone unit and an electronic device. The capacitive MEMS microphone includes: a back electrode plate; a diaphragm; and a spacer for separating the back electrode plate from the diaphragm, wherein in a state where no operating bias is applied, at least a portion of the diaphragm is pre-deviated in a direction away from the back electrode plate relative to a flat position.
    Type: Application
    Filed: June 30, 2020
    Publication date: November 2, 2023
    Applicant: GOERTEKMICROELECTRONICS CO., LTD.
    Inventors: Quanbo Zou, Maoqiang Dang, Dexin Wang
  • CAPACITIVE MEMS MICROPHONE, MICROPHONE UNIT AND ELECTRONIC DEVICE
    Publication number: 20230224646
    Abstract: Disclosed in embodiments of the present disclosure are a capacitive MEMS microphone, a microphone unit and an electronic device. The capacitive MEMS microphone includes: a back electrode plate; a diaphragm; and a spacer for separating the back electrode plate from the diaphragm, wherein in a state where an operating bias is applied, a ratio of a static effective displacement of the diaphragm relative to a flat position to a thickness of the diaphragm is greater than or equal to 0.5.
    Type: Application
    Filed: June 30, 2020
    Publication date: July 13, 2023
    Applicant: GOERTEKMICROELECTRONICS CO., LTD.
    Inventors: Quanbo Zou, Maoqiang Dang, Dexin Wang