Abstract: A lighting dome that can be used to inspect semiconductor wafers can include a small aperture, backlighting, a reflectance gradient and/or a broad spectrum light source.
Type:
Application
Filed:
October 7, 2015
Publication date:
January 28, 2016
Applicant:
GRAFTEK IMAGING INC.
Inventors:
Romik Chatterjee, Robert Martin Eastlund, Christopher Jan Koci, Archer Forrest Finley
Abstract: A lighting dome that can be used to inspect semiconductor wafers includes a small aperture, and can include backlighting, a reflectance gradient and/or a broad spectrum light source. A pin hole lens is aligned with the small aperture.
Type:
Grant
Filed:
March 14, 2013
Date of Patent:
October 13, 2015
Assignee:
GRAFTEK IMAGING INC.
Inventors:
Romik Chatterjee, Robert Martin Eastlund, Christopher Jan Koci, Archer Forrest Finley