Abstract: An inverse matrix iterative deconvolution method for spectral resolution enhancement comprises the following steps: step 1, sequence convolution and convolution square matrices; step 2, cumulative multiplication of convolution square matrices and convolution kernel function peak broadening; and step 3, peak resolution enhancement. The invention achieves the purpose of narrowing the peak width by multiplying primitive functions by deconvolution matrices. Further, the invention provides a method for constructing a deconvolution identity matrix to achieve the deconvolution effect with an expected precision. The calculation process is fast and controllable with stable and accurate results, and the application range is wide. The method can be used for resolution enhancement of molecular spectra such as Raman and infrared spectra, as well as other spectra with symmetrical peak patterns such as mass spectra, nuclear magnetic resonance, XRD and XRF.