Abstract: An absolute position measurement capacitive grating displacement measurement method, a sensor, and an operating method of the sensor are provided. In the measurement method, a drive signal having wave properties is used to excite a transmission grating, and displacement of a measured position in each wavelength is transformed into an initial phase of a time fundamental wave. The displacement of the measured position in each wavelength is acquired through an addition counter. A signal having wave properties output by a drive signal generator of the sensor is connected to a transmission grating, the master clock of an oscillator is connected to each circuit, an output of a reception grating is connected to a synchronous capture circuit through a signal selection switch and an analog processing circuit; and the synchronous capture circuit is connected to a controller, an addition counter, and a Random Access Memory (RAM). The controller is connected to all components.

Abstract: An absolute position measurement capacitive grating displacement measurement method, a sensor, and an operating method of the sensor are provided. In the measurement method, a drive signal having wave properties is used to excite a transmission grating, and displacement of a measured position in each wavelength is transformed into an initial phase of a time fundamental wave. The displacement of the measured position in each wavelength is acquired through an addition counter. A signal having wave properties output by a drive signal generator of the sensor is connected to a transmission grating, the master clock of an oscillator is connected to each circuit, an output of a reception grating is connected to a synchronous capture circuit through a signal selection switch and an analog processing circuit; and the synchronous capture circuit is connected to a controller, an addition counter, and a Random Access Memory (RAM). The controller is connected to all components.