Patents Assigned to H. C. Starck Clevios GmbH
  • Tungsten and molybdenum compounds and their use for chemical vapour deposition (CVD)
    Patent number: 7754908
    Abstract: The present invention relates to specific novel tungsten and molybdenum compounds to the use thereof for the deposition of tungsten- or molybdenum-containing layers by means of chemical vapour deposition, and to the tungsten- or molybdenum-containing layers produced by this process.
    Type: Grant
    Filed: January 4, 2007
    Date of Patent: July 13, 2010
    Assignee: H. C. Starck Clevios GmbH
    Inventors: Knud Reuter, Jörg Sundermeyer, Alexei Merkoulov, Wolfgang Stolz, Kestin Volz, Michael Pokoj, Thomas Ochs