Abstract: An electrostatic dust collector including a wall enclosing a vacuum chamber in which a target face to be subjected to dust removal is provided, an electron beam emitting device for emitting electron beams to dust on the target face so as to charge the dust negatively, a dielectric member which is provided in the vacuum chamber and has a collecting face confronting the target face and a member for imparting positive potential to the collecting face such that the dust charged negatively is attracted to the collecting face.
Type:
Grant
Filed:
July 19, 1989
Date of Patent:
July 17, 1990
Assignees:
Matsushita Electric Industrial Co., Ltd., Hajima Ishimaru