Abstract: An abrading machine and abrading method are provided which permit a workpiece to be abraded without damage even in the case of heavy stock removal. A work holding member for mechanical abrasion includes a first holding member with a hole for receiving a workpiece and which transmits external drive force to the workpiece, and a second holding member placed on the first holding member and also having a hole for receiving the workpiece. The second holding member is removed after a predetermined volume of stock is abraded away; the workpiece is then abraded to a target thickness while being held by the first holding member alone. Thicknesses t1 and t2 of the first and second holding members are given by T1>t1+t2 and (½)T2≦t1, where T1 and T2 represent the workpiece thickness before and after abrasion, respectively.
Type:
Grant
Filed:
January 31, 2002
Date of Patent:
April 29, 2003
Assignees:
International Business Machines Corporation, Hamai Co., Ltd.
Abstract: A planetry-gear-type parallel-surface processing machine of the present invention improves the ability of an upper surface plate to follow matrials to be processed. A rotation preventing pin projects from the upper surface of the upper surface plate at a position near the outer periphery thereof, the rotation of the upper surface plate is prevented by abutting a stopper supported by a bracket disposed on a machine main body against a side of the rotation preventing pin, plural pulleys are disposed in a ring mounted to the upper surface plate and suspension plate, and an endless wire cable is stretched between the pulleys so as to support the vertical load of the upper surface plate.