Abstract: The present invention relates to the trail spindle of a lathe including an oil hydraulic circuit for thrust compensation, wherein lathe turning operations on a processing object can be performed always accurately by preventing the processing object from being swung and the shape of the processing object from being deformed, in such a manner that necessary thrust is generated by using an oil hydraulic cylinder and a pressure reducing and relieving valve without using the existing method of moving a tail spindle using a screw and the oil hydraulic circuit automatically performs thrust compensation (i.e., maintains constant thrust) according to a change in the length of the processing object during lathe turning operations.

Abstract: A pad conditioner for a chemical mechanical polishing (CMP) apparatus which is adapted to remove a glazing phenomenon occurring on a polishing pad when wafers are machined using the CMP apparatus. The pad conditioner includes a swing arm pivotally mounted at one end thereof to a desired portion of the upper surface of the chemical mechanical polishing apparatus by a pivot shaft, a rotating oscillator coupled to the other end of the swing arm and adapted to horizontally rotate a conditioning tool mounted thereto while vertically oscillating the conditioning tool, the rotating oscillator including a rotating unit for horizontally rotating the conditioning tool and an oscillation generating unit for vertically oscillating the conditioning tool, and a vertical carrier unit coupled to the other end of the swing arm and adapted to vertically move the rotating oscillator.