Abstract: Sputtering system for cathode sputtering apparatus, having a cathode base body with a target of the material to be sputtered. In the marginal part of the target an anode is disposed which is provided with at least one groove. For the solution of the problem of obtaining stable operating conditions in the lengthy coating of substrates with insulating materials and of drawing a high portion of the cathode current to the anode for a long period of time, the at least one groove opens, in accordance with the invention, on a side of the anode that is not in line of sight with the target.

Abstract: The invention concerns a method of producing optical elements, in particular filters, with interference layers comprising alternately slightly refractive and highly refractive dielectric layers deposited on a substrate S. The first layer 1 applied to the substrate is Al.sub.2 O.sub.3, constituting a slightly refractive layer, after which further layers 2 to n of ZnS and Al.sub.2 O.sub.3 are applied in an alternating sequence. The last layer n consists of Al.sub.2 O.sub.3. Such layers can be applied, at low temperatures, on flat substrates and, in particular, on sharply curved substrates. Production costs are reduced, and these layers possess the optical properties of known interference layers however resistance to external influences is greatly increased. In the case of mineral substrates, the coatings also offer considerable resistance to boiling.

Abstract: A magnetron cathode for sputtering targets of ferromagnetic materials. A cathode ground body (2) has at least one supporting surface (4a, 4c) for the target and a magnet system (6) with magnet poles of opposite polarity cohering on the circumference, lying inside one another, and separated by a gap (5a). The target is divided by at least one air gap geometrically similar to the shape of the interval into at least two target parts (12, 13) which are staggered in the direction of the depth of the cathode on the at least one supporting surface (4a, 4c). In accordance with the invention,(a) the magnet system (6) is disposed in back of the farthest set-back supporting surface (4a) for the target (12, 13), and(b) The width "s" of the air gap (14) in the direction of the depth of the cathode is smaller than the dark space interval necessary under operating conditions.