Abstract: An apparatus and method for detecting defects in a wafer are provided. An optical part is disposed under an inspection stage and radiates infrared light. An image obtaining part detects the infrared light transmitted through the wafer to output an image signal. A conveying part conveys the image obtaining part or the inspection stage in a short side direction of a photographing region of a line sensor included in the image obtaining part, and outputs a pulse signal. A controller counts the pulse signal and outputs a photographing instruction signal controlling the image obtaining part to photograph the wafer whenever the wafer is conveyed in the short side direction of the photographing region of the line sensor toward the image obtaining part by a distance corresponding to the length of short sides of the photographing region. A defect detection part combines each image signal to generate an inspection image.
Type:
Grant
Filed:
February 7, 2007
Date of Patent:
November 8, 2011
Assignee:
Hantech Co., Ltd.
Inventors:
U-Seock Moon, Jong-Kyu Han, Byoung-Moon Hwang, Jin-Seob Kim
Abstract: The present invention provides a system for processing a semiconductor substrate using a laser beam, the system including: a storing unit storing a process control data set for a slot for loading the semiconductor substrate therein; a process controlling unit detecting identification information of the slot in which the semiconductor substrate is loaded, and reading the control data, which is set for the detected identification information, from the storing unit to control a process of the semiconductor substrate; and a substrate processing unit processing the semiconductor substrate on the basis of the read control data using the laser beam with a predetermined energy.
Abstract: Disclosed is a strengthening construction for depressing cap of water filter, said depressing cap has a water inlet and a water exit, a pipe line which does not form a via hole for connecting said water inlet and water exit is formed between said water inlet and water exit, and a water falling hole is formed at said pipe line near said water inlet, in addition, a water outlet is formed at the central portion of said pipe line, on the inner wall of the depressing cap, a plurality of gripping elements for firmly holding filter core are separately formed and circularly arrayed, characterized in that: at the base portions of said gripping elements, at least a ring-shaped protecting wall in formed to connect the base portions of said gripping elements. Such that when the water filter is impacted by external force, the impact force on the gripping elements shall be dissipated.
Type:
Grant
Filed:
February 7, 2007
Date of Patent:
October 14, 2008
Assignee:
Hantech Co., Ltd.
Inventors:
Hsieh Wen-Pin, Huang Chung-Yen, Lin Chih-Kai, Hu Chien-Hsin, Wang Mei-Hsin
Abstract: The disclosure is an optical measuring system and the method thereof for precisely measuring physical characteristics of light emitted from waveguides, such as beam size, pattern, strength, focusing, collimation degree, and divergence angle, by means of a plane optical detector in which a plurality of pixels formed by a semiconductor fabrication process are arranged in an array, without specific measuring means. The light is incident into ends of the arrayed waveguides with uniform time intervals and emitted from the other ends of the waveguides to reach the optical detectors through which the physical characteristics of the light are obtained and defined arithmetically.
Type:
Grant
Filed:
July 12, 2002
Date of Patent:
February 20, 2007
Assignees:
Hantech Co., Ltd., Institute of Information Technology Assessment
Inventors:
Gwan Chong Joo, Jae Shik Choi, Ki Woo Chung, Do Hoon Kim
Abstract: An optical fiber array block includes at least one optical waveguide having an optical fiber zone, and an optical device. An optical signal leakage window is formed at the optical waveguide, and the optical device corresponds to the optical signal leakage window. If the optical signal leakage window is formed at an optical fiber comprising a core and a clad layer, the clad layer is partially removed or is partially connected to the core by means of an ion implantation technique.
Type:
Grant
Filed:
November 6, 2002
Date of Patent:
March 7, 2006
Assignee:
Hantech Co., Ltd.
Inventors:
Gwan Chong Joo, Jae Shik Choi, Ki Woo Chung, Do Hoon Kim