Patents Assigned to Heinrich-Hertz-Institute fur Nachrichtentechnik Berlin GmbH
  • Method of removing noxious substances from gases
    Patent number: 4612174
    Abstract: Waste gases and other noxious substances which are formed in connection with chemical processes and the manufacture of devices such as semiconductors and covalent hydrides and element organic compounds, etc. are treated so as to remove the noxious components.
    Type: Grant
    Filed: November 13, 1984
    Date of Patent: September 16, 1986
    Assignee: Heinrich-Hertz-Institute fur Nachrichtentechnik Berlin GmbH
    Inventors: Werner Fabian, Helmut Roehle, Peter Wolfram