Abstract: The present disclosure relates to a method of distinguishably detecting two biomarkers with cross-reactivity in a biological sample. The method comprises providing two sensor units specific to the two biomarkers, respectively; obtaining binding affinities of a series of known concentrations of the two biomarkers to the sensor units, respectively; contacting the biological sample with the two sensor units to produce two signals; and calculating the concentrations of the two biomarkers in the biological sample with the two signals and the binding affinities.

Abstract: The present disclosure provides a semiconductor sensing device. The semiconductor sensing device includes a substrate having a sensing region. The sensing region includes an active feature. The active feature includes an anchor portion, an elevated portion, and a nanowire portion. The anchor portion is on a top surface of the substrate. The elevated portion is spaced from the top surface of the substrate by a vertical distance and connected to the anchor portion. The nanowire portion is on the top surface of the substrate and connected to the anchor portion. The vertical distance is greater than or equal to a thickness of the nanowire portion.

Abstract: Present disclosure provides a method for multi-level etch. The method includes providing a substrate, forming a first reference feature over a control region of the substrate, forming an etchable layer over the first reference feature and a target region over the substrate, patterning a masking layer over the etchable layer, the masking layer having a first opening projecting over the control region and a second opening projecting over the target region, and removing a portion of the etchable layer through the first opening and the second opening until the first reference feature is reached. A semiconductor sensing device manufactured by the multi-level etch is also disclosed.

Abstract: A biosensors and a method of forming a probe on a solid surface of a biosensor are disclosed and the method includes the following steps. A unit (a nucleotide or an amino acid) capped with a protecting group is covalently bonded on the solid surface of one of a plurality of sensor cells of the biosensor. At least one cycle of the following steps is performed until a desired number of units is formed: irradiating the one of the plurality of sensor cells, so as to remove the protecting group of the unit; and binding a unit capped with the protecting group to the de-protected unit. The one of the plurality of sensor cells is irradiated to remove the protecting group.