Abstract: The invention relates to an indenter receptacle for a measuring device, having a receptacle for detachably fastening an indenter, having an interface for mounting a measuring device, wherein a solid body joint arrangement is provided, which at least three solid body joints are provided between the interface and the receptacle and which are aligned offset at 90° to one another with respect to their flexibility in only one spatial direction.

Abstract: A measuring device for detection pf measurement signals during a penetrating movement of a penetrating member into a surface of a test object or during a sensing movement of the penetrating member on the surface of the test object. The measuring device includes a housing which accommodates a force generating device and on which a holding element is arranged remote from the force generating device, which holding element is movable relative to the housing at least in one direction along a longitudinal axis of the housing and which accommodates the penetrating member.

Abstract: A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.

Abstract: An electronic device comprising a housing and an actuating element movable relative to the housing, wherein the actuating element comprises at least one metallic component, wherein the device comprises an inductive sensor for detecting a position and/or movement of the actuating element, wherein the inductive sensor comprises: a first measuring resonant circuit having a sensor coil, and an oscillation generator configured to generate an excitation oscillation and to at least temporarily apply the excitation oscillation to the first measuring resonant circuit.

Abstract: An apparatus includes a series connection of at least a first impedance and a second impedance, the first impedance having a first terminal and a second terminal and the second impedance having a first terminal and a second terminal. The second terminal of the first impedance is connected to the first terminal of the second impedance forming a first node. The apparatus further includes a signal generator to apply a first amplitude modulated signal to the first terminal of the first impedance and a second amplitude modulated signal to the second terminal of the second impedance; and further includes an evaluation device configured to receive a first measurement signal from the first node and to determine information on the at least one physical parameter depending on the first measurement signal.

Abstract: The invention relates to a method for measuring the thickness of non-magnetisable layers (51) on a magnetisable base material (52), the permeability of which is not known, having a measuring probe (11), which has a probe head (17), which comprises a pot core (31) having a first and second coil (36, 37), which lie on a common geometric axis (16), and in which the first and second coils (36, 37) form a first coil pair (38), and which has a bearing calotte (21) in a common axis (16), in which the probe head (17) is placed on the layer (51) to measure the thickness of the layer (51) on the base material (52), wherein a first interaction volume is detected by the first coil pair (38) with a field focusing caused by the pot core (31), a second interaction volume is detected by a second coil par (44) with a first and second coil (42, 43), which is arranged outside the pot core (31) and jointly with the geometric axis (16) without field focusing by the pot core (21), and the detected first and second base material vo

Abstract: A measuring system for detecting measuring signals during a penetration movement of a penetration body into a surface of a test body, including a housing with a power generating device, which is operatively connected to a penetration body for generating a displacement movement of the penetration body along a longitudinal axis of the housing, and which actuates a penetration movement of the penetration body into the surface of the test body to be examined, or which positions the penetration body on the surface of the test body for scanning, and having at least one first measuring device for measuring the penetration depth into the surface of the test body or a displacement movement of the penetration body along the longitudinal axis of the housing during a scanning movement on the surface of the test body. The power generating device is actuated by a pressure medium for the penetration movement of the penetration body.

Abstract: A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.

Abstract: An apparatus includes a series connection of at least a first impedance and a second impedance, the first impedance having a first terminal and a second terminal and the second impedance having a first terminal and a second terminal. The second terminal of the first impedance is connected to the first terminal of the second impedance forming a first node. The apparatus further includes a signal generator to apply a first amplitude modulated signal to the first terminal of the first impedance and a second amplitude modulated signal to the second terminal of the second impedance; and further includes an evaluation device configured to receive a first measurement signal from the first node and to determine information on the at least one physical parameter depending on the first measurement signal.

Abstract: Measuring probe for non-destructive measuring of the thickness of thin layers, in particular in cavities, which are accessible by an opening or on curved surfaces, with a measuring head, which includes at least one sensor element and at least one contact spherical cap, assigned to the sensor element on a surface, to be checked, of the cavity, and with a gripping element for positioning and guiding the measuring probe on and/or along the surface to be measured, wherein on the gripping element, a long, elastically yielding guide bar is provided, which accepts the at least one measuring head on its end opposing the gripping element, in such a way that it is moveable with at least one degree of freedom in relation to the guide bar.

Abstract: A handheld instrument and a mobile device for x-ray fluorescence analysis has a housing and a handle, having an x-ray fluorescence measurement device by which a primary beam is directed onto a measurement surface of a measurement object through an outlet window, a detector which detects the secondary radiation emitted by the measurement surface, and a data processing device which controls a display. The outlet window on a front-side end of a first housing section and a positioning element is on the first housing section. A support element is on a further housing section, at a distance to the outlet window. The handheld instrument is aligned with respect to the measurement surface after the positioning on the measurement surface by the positioning element. The support element is positioned autonomously with respect to the measurement surface in a measurement position.

Abstract: A measuring probe for the measurement of the thickness of thin layers, includes a housing, at least one sensor element which is mounted with at least one spring element to be flexible with respect to the housing, the sensor element having a spherical positioning cap pointing towards the measuring surface of an object of measurement against a touchdown direction and along a longitudinal axis thereof, and an attenuating device on the housing which acts in the touchdown direction of the at least one sensor element before the sensor element is fitted onto the measuring surface of the object of measurement and attenuates the touchdown movement of the at least one sensor element in the direction of the measuring surface of the object of measurement.

Abstract: The invention relates to a device to position and align a rotationally-symmetrical body (28) with respect to a measuring device (19) for the implementation of a measurement on the rotationally-symmetrical body (28), having a basic element (24) which has a contact surface (22) on a pin (23) or is allocated to a contact surface (22) on which the rotationally-symmetrical body (28) is supported for the implementation of the measurement, wherein a positioning element (41) which can be moved relative to the contact surface (22) is provided on the basic element (24), said positioning element (41) comprising a prismatic receiver (64), wherein the contact surface (22) is positioned within the prismatic receiver (64) or abuts on this and a movement path of the positioning element (41) towards the basic element (22) corresponds at least to the height of the prismatic receiver (64).

Abstract: A method for measurement of the thickness of thin layers or determination of an element concentration of a measurement object. A primary beam is directed from an X-ray radiation source onto the measurement object. A secondary radiation emitted by the measurement object is detected by a detector and is relayed to an evaluation device. The primary beam is moved within a grid surface which is divided into grid partial surfaces as well as subdivided into at least one line and at least one column. For each grid partial surface a primary beam is directed onto the grid surface. A measuring spot of the primary beam fills at least the grid point. A lateral dimension of the measurement surface is detected and compared to the size of the measuring spot of the primary beam appearing on the measurement object, for size determination of the measurement surface of the measurement object.

Abstract: The invention relates to a measuring probe for non-destructive measuring of the thickness of thin layers on an object with a measuring head, which comprises at least one sensor element for contact on a measurement surface of an object, and with a support device for receiving the measuring head, which is at least partly surrounded by a housing, wherein at least one further measuring head, which is adjacent to and separated from the first measuring head, is arranged on the support device, which can be controlled independently of the first measuring head.

Abstract: The invention relates to a method for the electric control of a measurement stand (11) having a drive movement of at least one measurement probe (26) from an initial position (31) into a measurement position (32), in particular for the measurement of the thickness of thin layers in which a motor (34) is controlled for the drive movement of the measurement probe (26), said motor (34) moving a ram (23), to which the measurement probe (26) is fastened, back and forth via a drive device (35) at least for the implementation of a measurement, wherein before a first measurement with the measurement probe (26), a learning routine is carried out, and for the subsequent implementation of one or more measurements, the measurement probe (26) is transferred from the initial position (31) into the measurement position (32), and the drive path of the measurement probe (26) from the initial position (31) into the measurement position (32) is divided into a fast speed and, before the setting of the measurement probe (26) on t

Abstract: A method for electrically activating a measurement stand with a movement of at least one measuring probe (26) from a starting position (31) into a measuring position (32) and also a measurement stand for supporting a measuring probe, in particular for measuring the thickness of thin layers, in which a motor (34) is activated by a control arrangement (25), which moves a ram (23) up and down via a drive arrangement (35), wherein a retainer (24) is provided on the ram (23), to which retainer the measuring probe (26) can be fastened, in which a freewheel is activated between the drive arrangement (35) and the ram (33) as soon as the measuring probe (26) or retainer (23) is set down in the measuring position (32) on an item to be measured (14) and the movement of the drive arrangement (35) is decoupled from the vertical movement of the ram (23), wherein a movement speed of the at least one measuring probe (14) from the starting position (31) into the measuring position (32) is reduced by mechanical damping or elec

Abstract: The invention relates to a measuring probe for measuring the thickness of thin layers with a housing, having at least one sensor element, which is received in the housing at least slightly moveably along a longitudinal axis and which comprises at least one winding device, which is allocated to the longitudinal axis, having a spherical positioning cap facing the outer front face of the housing, said cap being arranged in the longitudinal axis, wherein the spherical positioning cap has a basic body that has a cylindrical core section and a pole cap arranged on a front face of the core section, wherein the winding device is allocated to the spherical positioning cap, said winding device being formed from a discoidal or annular carrier with at least one Archimedean coil arranged thereon and with the basic body consisting of a ferritic material and the pole cap consisting of a hard metal.