Abstract: An apparatus includes at least one Terahertz (THz) device that transmits or receives THz radiation or transmits and receives THz radiation. The apparatus also provides a flow of protective gas in at least one portion of the beam path of the THz radiation.
Type:
Grant
Filed:
July 17, 2020
Date of Patent:
January 7, 2025
Assignee:
HELMUT FISCHER GMBH INSTITUT FÜR ELEKRONIK UND MESSTECHNIK
Inventors:
Rüdiger Mästle, Henry Thiele, Andreas Godorr