Abstract: The invention relates to an indenter receptacle for a measuring device, having a receptacle for detachably fastening an indenter, having an interface for mounting a measuring device, wherein a solid body joint arrangement is provided, which at least three solid body joints are provided between the interface and the receptacle and which are aligned offset at 90° to one another with respect to their flexibility in only one spatial direction.

Abstract: A measuring device for detection pf measurement signals during a penetrating movement of a penetrating member into a surface of a test object or during a sensing movement of the penetrating member on the surface of the test object. The measuring device includes a housing which accommodates a force generating device and on which a holding element is arranged remote from the force generating device, which holding element is movable relative to the housing at least in one direction along a longitudinal axis of the housing and which accommodates the penetrating member.

Abstract: A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.

Abstract: The invention relates to a method for measuring the thickness of non-magnetisable layers (51) on a magnetisable base material (52), the permeability of which is not known, having a measuring probe (11), which has a probe head (17), which comprises a pot core (31) having a first and second coil (36, 37), which lie on a common geometric axis (16), and in which the first and second coils (36, 37) form a first coil pair (38), and which has a bearing calotte (21) in a common axis (16), in which the probe head (17) is placed on the layer (51) to measure the thickness of the layer (51) on the base material (52), wherein a first interaction volume is detected by the first coil pair (38) with a field focusing caused by the pot core (31), a second interaction volume is detected by a second coil par (44) with a first and second coil (42, 43), which is arranged outside the pot core (31) and jointly with the geometric axis (16) without field focusing by the pot core (21), and the detected first and second base material vo

Abstract: A measuring system for detecting measuring signals during a penetration movement of a penetration body into a surface of a test body, including a housing with a power generating device, which is operatively connected to a penetration body for generating a displacement movement of the penetration body along a longitudinal axis of the housing, and which actuates a penetration movement of the penetration body into the surface of the test body to be examined, or which positions the penetration body on the surface of the test body for scanning, and having at least one first measuring device for measuring the penetration depth into the surface of the test body or a displacement movement of the penetration body along the longitudinal axis of the housing during a scanning movement on the surface of the test body. The power generating device is actuated by a pressure medium for the penetration movement of the penetration body.

Abstract: A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.

Abstract: A handheld instrument and a mobile device for x-ray fluorescence analysis has a housing and a handle, having an x-ray fluorescence measurement device by which a primary beam is directed onto a measurement surface of a measurement object through an outlet window, a detector which detects the secondary radiation emitted by the measurement surface, and a data processing device which controls a display. The outlet window on a front-side end of a first housing section and a positioning element is on the first housing section. A support element is on a further housing section, at a distance to the outlet window. The handheld instrument is aligned with respect to the measurement surface after the positioning on the measurement surface by the positioning element. The support element is positioned autonomously with respect to the measurement surface in a measurement position.

Abstract: The invention relates to a device to position and align a rotationally-symmetrical body (28) with respect to a measuring device (19) for the implementation of a measurement on the rotationally-symmetrical body (28), having a basic element (24) which has a contact surface (22) on a pin (23) or is allocated to a contact surface (22) on which the rotationally-symmetrical body (28) is supported for the implementation of the measurement, wherein a positioning element (41) which can be moved relative to the contact surface (22) is provided on the basic element (24), said positioning element (41) comprising a prismatic receiver (64), wherein the contact surface (22) is positioned within the prismatic receiver (64) or abuts on this and a movement path of the positioning element (41) towards the basic element (22) corresponds at least to the height of the prismatic receiver (64).

Abstract: A method for measurement of the thickness of thin layers or determination of an element concentration of a measurement object. A primary beam is directed from an X-ray radiation source onto the measurement object. A secondary radiation emitted by the measurement object is detected by a detector and is relayed to an evaluation device. The primary beam is moved within a grid surface which is divided into grid partial surfaces as well as subdivided into at least one line and at least one column. For each grid partial surface a primary beam is directed onto the grid surface. A measuring spot of the primary beam fills at least the grid point. A lateral dimension of the measurement surface is detected and compared to the size of the measuring spot of the primary beam appearing on the measurement object, for size determination of the measurement surface of the measurement object.

Abstract: The invention relates to a method for the electric control of a measurement stand (11) having a drive movement of at least one measurement probe (26) from an initial position (31) into a measurement position (32), in particular for the measurement of the thickness of thin layers in which a motor (34) is controlled for the drive movement of the measurement probe (26), said motor (34) moving a ram (23), to which the measurement probe (26) is fastened, back and forth via a drive device (35) at least for the implementation of a measurement, wherein before a first measurement with the measurement probe (26), a learning routine is carried out, and for the subsequent implementation of one or more measurements, the measurement probe (26) is transferred from the initial position (31) into the measurement position (32), and the drive path of the measurement probe (26) from the initial position (31) into the measurement position (32) is divided into a fast speed and, before the setting of the measurement probe (26) on t

Abstract: A method for electrically activating a measurement stand with a movement of at least one measuring probe (26) from a starting position (31) into a measuring position (32) and also a measurement stand for supporting a measuring probe, in particular for measuring the thickness of thin layers, in which a motor (34) is activated by a control arrangement (25), which moves a ram (23) up and down via a drive arrangement (35), wherein a retainer (24) is provided on the ram (23), to which retainer the measuring probe (26) can be fastened, in which a freewheel is activated between the drive arrangement (35) and the ram (33) as soon as the measuring probe (26) or retainer (23) is set down in the measuring position (32) on an item to be measured (14) and the movement of the drive arrangement (35) is decoupled from the vertical movement of the ram (23), wherein a movement speed of the at least one measuring probe (14) from the starting position (31) into the measuring position (32) is reduced by mechanical damping or elec

Abstract: The invention relates to a method for performing an x-ray fluorescence analysis, in which method a primary radiation (16) is directed at a specimen (12) by an x-radiation source (14) and in which method a secondary radiation (18) emitted by the specimen (12) is detected by a detector (20) and evaluated by means of an evaluating unit (21), wherein at least one filter (23) having at least one filter layer (25) forming a filter plane is brought into the beam path of the secondary radiation (18) and acts as a band-pass filter in dependence on an angle ? of the filter layer (25) to the secondary radiation (18) and an interfering wavelength of the secondary radiation (18) is coupled out by Bragg reflection, the angle ? of the filter layer (25) of the filter (23) is set by means of a setting apparatus (31) to reflect at least one interfering wavelength of the secondary radiation (18) by Bragg reflection, and the coupled-out wavelength of the secondary radiation (18) is detected by a second detector (32) and the sign

Abstract: The invention relates to a measuring probe for measuring the thickness of thin layers, having a housing (14) with at least one sensor element (17), which is received at least slightly moveably along a longitudinal axis (16) and which comprises at least one first winding device (44), which has a magnetic pot core (41) arranged in the longitudinal axis (16) of the housing (14), and to whose central pin (42) a first and second coil (70, 71) are allocated, and having a spherical positioning cap (21) on the central pin (42) pointing towards the measuring surface of an object to be measured, which cap comprises a bearing surface (57) for fitting on a measuring surface, wherein a second winding device (48) is provided allocated to the spherical positioning cap (21), which device is formed from a discoidal or annular carrier (49) having at least one Archimedean coil (51), and a shield (83, 85) is provided at least partially between the first and second winding device (44, 48).

Abstract: The invention relates to a measuring probe for measuring the thickness of thin layers with a housing (14), having at least one sensor element (17), which is received in the housing (14) at least slightly moveably along a longitudinal axis (16) and which comprises at least one winding device (44), which is allocated to the longitudinal axis (16), having a spherical positioning cap (21) facing the outer front face of the housing (14), said cap being arranged in the longitudinal axis (16), wherein the spherical positioning cap (21) has a basic body (55) that has a cylindrical core section (56) and a pol cap (58) arranged on a front face of the core section (56), wherein the winding device (44) is allocated to the spherical positioning cap (21), said winding device being formed from a discoidal or annular carrier (49) with at least one Archimedean coil (51) arranged thereon and with the basic body (55) consisting of a ferritic material and the pol cap consisting of a hard metal.

Abstract: The invention relates to a measurement stand for holding a measuring probe intended in particular for measuring the thickness of thin layers, and to a method for controlling the measurement stand.

Abstract: The invention relates to a method of setting a position of an object of measurement in layer thickness measurement by X-ray fluorescence in which a beam of an optical recording device is projected into the beam of the X-radiation and in which the surface of the object of measurement is recorded and output as an image comprising a number of image points, with the distance between the surface and the collimator being changed by an absolute amount of a path of movement, with changes in brightness of the image points being recorded in at least one measuring plane during the at least one change of the distance between the surface and the collimator, with the maximum of the difference in brightness of the image points of an image being ascertained after the at least one change of the absolute amount of the distance, and with the distance between the collimator and the object of measurement being set to the position of the ascertained maximum of the difference in brightness.