Abstract: In a process for cleaning a silicon mass with a acid washing solution, a waste solution containing a mixed acid composed of nitric acid and hydrofluoric acid is introduced to a distillation step, and hydrofluoric acid is introduced to a distillation cooling portion to prevent precipitation of silicon dioxide. The waste cleaning liquor is distilled to recover nitric acid.
Abstract: A method and apparatus for cutting polycrystalline silicon rods which comprise applying pressing forces at at least two positions on a plane perpendicular to the longitudinal axis of a polycrystalline silicon rod at a plurality of positions symmetrical to said axis.