Abstract: A method for cleaning a cross-flow filter (20), comprising the steps of: A) providing a cross-flow filter (20), wherein the cross-flow filter (20) comprises a filter membrane (21) and is configured to remove a liquid permeate stream and the filter membrane (21) comprises a first side facing the permeate stream and a second side opposite the first side, the second side facing the feed stream, and wherein at least some of the deposits (1010) to be removed are located on the second side of the filter membrane (21); B) applying a back-flushing liquid stream through the filter membrane (21). Prior to applying the back-flushing liquid stream in Step B), permeate located on the first side of the filter membrane (21) is at least partially displaced from the first side of the filter membrane (21) by a gas, wherein the gas that is in contact with the back-flushing liquid stream has a pressure of >1 bar at least during Step B).

Abstract: A method for recycling waste water containing slurry from a semiconductor treatment process; including: Filtration in which waste water containing the fresh slurry is continuously introduced into a circulation tank, during which time the mixed waste water is continuously extracted from the circulation tank, the extracted waste water is guided through an ultrafilter device and is concentrated by removing the fluid to form concentrated waste water and the concentrated waste water is introduced into the circulation tank and mixed with the contents of the circulation tank; and concentration in which the addition of fresh waste water to the circulation tank is essentially stopped when the mixed waste water is continuously extracted from the circulation tank, said extracted mixed water waster being introduced through the ultrafilter device and is concentrated by removing the fluid to form concentrated waste water and the concentrated waste water is introduced into the circulation tank.

Abstract: A method for cleaning a cross-flow filter (20), comprising the steps of: A) providing a cross-flow filter (20), wherein the cross-flow filter (20) comprises a filter membrane (21) and is configured to remove a liquid permeate stream and the filter membrane (21) comprises a first side facing the permeate stream and a second side opposite the first side, the second side facing the feed stream, and wherein at least some of the deposits (1010) to be removed are located on the second side of the filter membrane (21); B) applying a back-flushing liquid stream through the filter membrane (21). Prior to applying the back-flushing liquid stream in Step B), permeate located on the first side of the filter membrane (21) is at least partially displaced from the first side of the filter membrane (21) by a gas, wherein the gas that is in contact with the back-flushing liquid stream has a pressure of >1 bar at least during Step B).

Abstract: A recycling device for recycling slurry wastewater from a semiconductor processing process is provided.

Abstract: A method for recycling waste water containing slurry from a semiconductor treatment process; including: Filtration in which waste water containing the fresh slurry is continuously introduced into a circulation tank, during which time the mixed waste water is continuously extracted from the circulation tank, the extracted waste water is guided through an ultrafilter device and is concentrated by removing the fluid to form concentrated waste water and the concentrated waste water is introduced into the circulation tank and mixed with the contents of the circulation tank; and concentration in which the addition of fresh waste water to the circulation tank is essentially stopped when the mixed waste water is continuously extracted from the circulation tank, said extracted mixed water waster being introduced through the ultrafilter device and is concentrated by removing the fluid to form concentrated waste water and the concentrated waste water is introduced into the circulation tank.