Patents Assigned to HIGHWAVE OPTICAL TECHNOLOGIES MARSEILLE
  • Method and apparatus for depositing thin layers
    Publication number: 20020068126
    Abstract: The present invention relates to a method and to apparatus for depositing thin layers. The technical field of the invention is that of manufacturing thin layer optical devices. In the invention, apparatus for depositing thin layers on a plurality of substrates comprises means for producing a light beam for monitoring the optical thicknesses of the substrates.
    Type: Application
    Filed: November 1, 2001
    Publication date: June 6, 2002
    Applicant: HIGHWAVE OPTICAL TECHNOLOGIES MARSEILLE
    Inventor: Catherine Grezes-Besset