Abstract: The FOUP door positioning device of a FOUP opener is compatible with all kinds of FOUPs, is inexpensive, and has a simple positioning-ping adjustment mechanism. In a state in which a flange portion (a portion having a taper 13) of a proximal end portion of a positioning pin 10 is seated in a recess portion 31 of a port door 30, and an air suction bore 14 of the positioning pin 10 and an air suction bore 32 of the port door 30 are aligned with each other, a pin insertion hole 23 of a suction pad 20 is fitted to a straight portion 11 of the positioning pin 10, and the suction pad 20 is screwed to the port door 30. By this procedure, the suction pad 20 is attached to the outer surface of the port door 30, and a portion of the suction pad 20 which is sunk into a recess portion 31 presses the flange portion of the proximal end portion of the positioning pin 10. A reinforcing metal plate 25 is embedded in a base portion 21 of the suction pad 20.

Abstract: The present invention provides a method for measuring a clearance (13) between facing surfaces of a first member (11) and a second member (12). The method includes a step (S1) of bringing a pair of probes each having a tip end (14) slightly larger than the clearance (13) into direct contact with the clearance (13) and measuring a separation distance between the two tip ends (14), and a calculating step (S2) of calculating and measuring a clearance value (d1) on the basis of the separation distance between the tip ends (14).

Abstract: This invention provides a roller assembly including a rotary member including a driving shaft portion and a convey roller portion provided with the driving shaft portion, a driving wheel including a hole portion and attached to the driving shaft portion, the driving wheel being driven to rotate, a transmission receiving portion radially extending outward from the driving shaft portion and rotated together with the driving shaft portion, a friction transmission member clamped between the transmission receiving portion and a side surface of the driving wheel and frictionally transmitting a rotational force of the driving wheel to a rotary member, and a biasing portion applying a clamping force between the transmission receiving portion and the side surface of the driving wheel.

Abstract: A solution temperature control device in a biological cell observing chamber (30) used for the detection of chemotaxis and chemotactic cell separator, comprising a first temperature controller (62) and a second temperature controller (63). The first temperature controller (62) measures the temperature of a solution filled in a pair of wells and a flow passage in the chamber and controls the temperature to a specified temperature, and the second temperature controller (63) measures the temperature of a heating part (64) which heats the chamber (30) from the outside to indirectly heat the solution filled in the pair of wells and the flow passage and controls the temperature to a specified preheat temperature. Since the state and quantity of cells moving from one well to the other through the flow passage while holding the temperature of the solution at a specified temperature can be accurately observed and measured, accuracy for controlling the temperature of the solution can be remarkably increased.

Abstract: A storage system of the present invention includes a storage area for arranging and storing articles (W), a carrying-in line (200) for carrying in the articles (W) toward the storage area, and a transfer mechanism (300) arranged on an upper region of the storage area in order to transfer the articles (W) carried in by the carrying-in line to the storage area. The storage area includes a supporting table (100) for arranging and supporting a plurality of pallets (P) capable of loading the articles (W), and the transfer mechanism (300) transfers the articles (W) to the pallets (P) supported on the supporting table (100). Since an operation for transferring the articles stored directly on the floor face as before to the pallets is not required, a carrying-out process is simplified and efficiency of storage process of the articles as a whole (carrying-in from the outside, transfer to the storage area, carrying-out to the outside) is improved.

Abstract: A conveyor device is formed with roller units arranged continuously on conveyor frames (10, 10?). Each of the roller units includes a rotating body (110) having a cylindrical part (111) rotatably supported around a predetermined axis (A) and being rotationally driven, a roller (120) rotatably supported by an outer periphery of the cylindrical part to carry an object being conveyed on the outer peripheral surface thereof, a pair of thrust plates (140, 150) arranged so as to be capable of pressing both side surfaces of the roller while holding the roller therebetween and rotating integrally with the cylindrical part; and a pressing force adjusting mechanism (160, 170, 180, 190) arranged inside the cylindrical part to adjust a pressing force with which the paired thrust plates press the roller while holding the roller therebetween.

Abstract: To ensure that an abnormality in a closed state of a FOUP door serving as a lid of a FOUP can be detected quickly and reliably, a FOUP opener includes a port door attached detachably to an opening window in a port plate for separating the interior and exterior of a semiconductor processing device, and a dock unit for positioning the FOUP in a FOUP door attachment/detachment position. A suction disc mechanism and a lock mechanism for fixing the FOUP door to a FOUP main body and releasing the FOUP door are disposed on the port door. A FOUP door detection sensor for determining whether or not the FOUP door fixed to the FOUP main body, which is positioned in the FOUP door attachment/detachment position on the dock unit, is attached correctly to an opening portion of the FOUP main body is disposed on the port plate.

Abstract: A method for adjusting a valve clearance in a cylinder head using a rocker arm of a support point adjustable type. In the method, an adjustment screw is rotated in one direction until a camshaft comes in contact with a cam shaft contact section to make the amount of valve opening zero, then further rotated until the valve is released with a certain valve opening amount, and after that, rotated in a reverse direction by a certain rotation angle and accordingly loosened until a desired valve clearance value is obtained. In the process above, the method determines a first rotation angle of the adjustment screw necessary for the adjustment screw to move from a position where the valve is released with the certain valve opening amount to a position where the camshaft comes in contact with the camshaft contact section.

Abstract: The present invention provides a method and a device for accurately measuring and adjusting a valve clearance value to a desired value in an engine having a rocker-arm-type valve. According to a valve clearance measuring and adjusting method of the present invention, a pair of probes 60 each having a round tip end 611 are brought into direct contact with a valve clearance CV of an engine having a rocker-arm-type valve 105, and a center-to-center distance between the two tip ends 611 is measured. An actual valve clearance value is calculated and measured on the basis of the center-to-center distance between the tip ends 611. The actual valve clearance value is adjusted to a desired valve clearance value, while the actual valve clearance value is measured in real time.

Abstract: This invention relates to a FOUP opener in which a FOUP is placed and the FOUP door of the FOUP can be detached so as to allow access to the interior of the FOUP. The FOUP opener includes a port door having an attaching/detaching mechanism for attaching and detaching the FOUP door and a holding mechanism for holding the FOUP door to be detached, and a port door moving unit for moving said port door holding the FOUP door so as that the FOUP is opened. The port door has a main structure in which said attaching/detaching mechanism is arranged and a surface panel to cover said main structure. The surface panel is detachable from said main structure at a front side of the FOUP opener.

Abstract: A work handling apparatus includes a pair of traveling guides (20, 20?) provided so as to extend in a front-and-rear direction X at right and left sides, and a pair of direct-acting arms (30, 30?) provided so as to travel independently on the pair of traveling guides. The direct-acting arms are extendable from contracted positions, at which the arms oppose each other and avoid mutual interference in a right-and-left direction Y, to extended positions at which the arms overlap with each other. An operation spot (41) is arranged in an operation area (40) sandwiched between the pair of traveling guides for performing a predetermined operation to a work. Also, work tools (60, 60?) are attached to the pair of direct-acting arms (30, 30?), respectively, for transferring the work between a work storage area (50) and the operation spot (41) or performing an operation after transfer.

Abstract: A carrier transport system transports a plurality of carriers by a transport conveyor into a heating furnace, advances a comb-shaped carrier stopper having a plurality of protrusions toward the carriers, moves the carriers by the transport conveyor in a transport direction to engage cutout grooves, provided respectively for the carriers, with the protrusions of the carrier stopper to thereby position the carriers at a time. The carrier transport system advances the carrier stopper toward the carriers to insert distal ends of the protrusions of the carrier stopper into insertion holes, and then determines, on the basis of a moved distance X of the carrier stopper, whether the carriers are properly positioned.

Abstract: An assembly-target-object-and-assembly-component carrier pallet carries thereon a target object (semi-finished product) 2 and a plurality of assembly components arranged, as viewed in plane, on a straight line which passes through a predetermined attachment position on the target object where the predetermined assembly component is to be attached. This allows a minimum of moving parts in the attaching device which attaches the assembly components to the assembly target object. Therefore, the structure of an assembling apparatus is simplified and mechanical errors and assembly time are reduced, thereby improving assembling accuracy.

Abstract: A work inspector and carrier according to the present invention includes a carrier unit (40, 50, 60) for carrying a workpiece from a carry-in area to a carry-out area, and an inspection unit (70) for performing a predetermined inspection on the workpiece. The carrier unit is formed so as to move the inspection unit (70) together with the workpiece in order to carry the workpiece from the carry-in area to the carry-out area while performing the inspection by the inspection unit. When carrying the workpiece from the carry-in area to the carry-out area, the inspection unit performs the predetermined inspection on the workpiece while being moved together with the workpiece. Compared with a case where the workpiece is stopped at a predetermined inspecting position to perform the predetermined inspection on the workpiece and thereafter the is carried (inspection and transportation are performed separately), the overall time required for inspection and transportation can be shortened.

Abstract: A work transfer apparatus comprising a retaining unit (100) which can rotate unitary with a rotation table (20) which constitutes a transferring mechanism that is intermittently driven, a lifting and lowering unit (200) for lowering the retaining unit in order to transfer a work held by the retaining unit onto a processing table (30) as well as lifting the retaining unit in order to transfer the work held on the processing table onto the retaining unit, and a fixing unit (300) which can fix the work held on the retaining unit and release its fixation to transfer the work onto the processing table.

Abstract: Test equipment of engine motoring for automatically conducting an engine test includes a conveying mechanism that carries in and carries out an engine to and from a test position, a fixing mechanism that fixes the engine carried in to the test position, a coupling mechanism that directly couples an electrical motor to the engine and can detect drive torque, an encoder that generates a pulse signal as an operating standard in synchronism with rotation of the electrical motor, a plurality of detection units driven to reciprocate so as to be connected to and disconnected from or approach and separate from the engine positioned at the test position and detect a plurality of operating state quantities, a control unit for various driving controls, and a judging unit for judging whether the engine is normal by comparing information obtained by the plurality of detection units with standard information obtained in advance.

Abstract: This invention provides a substrate transport apparatus (100) which transports a substrate (W) placed on a hand portion (10) to a processing apparatus or a predetermined storage unit. The substrate transport apparatus (100) includes a moving means (20) for supporting the proximal side (10b) of the hand portion (10) serving as one end of the hand portion (10), and reciprocally moving the hand portion (10) in the direction of its extension, a tilt detection means (30) for detecting the tilt of a distal end (10a) of the hand portion (10) with respect to the horizontal direction, which accompanies flexure of the hand portion (10) upon placing the substrate (W) on the hand portion (10), and a tilt correction means (40) for generating a pitching motion of the hand portion (10) as a whole so as to cancel the tilt of the distal end (10a) of the hand portion (10).

Abstract: A route setting method according to the present invention sets, in a work transfer system including a plurality of work transfer units which connect a plurality of loading places to a plurality of unloading places, a route of the work transfer units to pass a work between a planned loading place and a planned unloading place which are required to transfer the work in the plurality of loading places and the plurality of unloading places. The route setting method includes the steps of setting, based on layout information representing a layout of the plurality of work transfer units, a plurality of candidates of the route between the planned loading place and the planned unloading place, and selecting, based on a predetermined condition, one route from the plurality of candidates of the route set in the candidate setting step.

Abstract: A piston-ring-installing device including a base (110) having a through-hole (111); and a guide member (120) disposed in the through-hole and fixed to the base, for positioning a piston in the vertical direction while receiving a head of the piston that is suspended downwardly in the vertical direction, and guiding a piston ring while widening a diameter of the piston ring by an outer peripheral surface of the guide member. A piston pressing member (130) is disposed above the base and supported movably toward a concave part (121b) of the guide member. The piston pressing member has a tapered inner wall surface (131) that is widened downwardly so as to come into contact with an edge of an upper end of the piston. A driving mechanism (140) is disposed on the base, and the driving mechanism is operable to drive the piston pressing member at least in the vertical direction. Also provided is a ring feeding mechanism (150) that feeds the piston ring placed on the guide member upwardly.

Abstract: [PROBLEMS] To provide a device and a method for teaching a work delivery position to a robot capable of teaching to the robot at low cost in a short time. [MEANS FOR SOLVING PROBLEMS] This device for teaching the work delivery position to the robot teaches, to the robot beforehand, the work delivery position where the center position of the work is not deviated when the work is delivered between a movable side robot hand (2) and a fixed side work loading table (8).