Abstract: A manufacturing system for manufacturing a laminated body by coating a first panel with an adhesive in a first working region and bonding the first panel coated with the adhesive and a second panel in a second working region includes a first conveying device in the first working region for conveying the first panel and the second panel, a coating device in the first working region for coating, with the adhesive, the first panel, a bonding device in the second working region for bonding the first panel and the second panel, and a second conveying device in the second working region for conveying the first panel and the second panel to the bonding device. The first conveying device and the second conveying device convey the first panel and the second panel to be bonded to each other as a set.

Abstract: An application system includes an application unit including a nozzle configured to discharge a seal agent to a work, and a moving device configured to move the application unit. The moving device includes a movable unit, an elevating unit, and a posture changing unit configured to be raised and lowered by the elevating unit and support the application unit. The nozzle includes a proximal end and a distal end portion configured to discharge the seal agent. The posture changing unit includes a pivot mechanism configured to make the application unit pivot about a vertical axis, and a pivot mechanism configured to make the application unit pivot about a horizontal axis. The vertical axis and the nozzle are located on the same axis, and the vertical axis and the horizontal axis cross on a center axis of the nozzle.

Abstract: The present invention is a specimen preparation method of preparing an observation specimen by placing an observation object on a light transmitting plate, comprising a conveyance step of conveying the observation object by a conveyance mechanism including a placement portion configured to place the observation object, and a transfer step of transferring the observation object from the placement portion of the conveyance mechanism onto the plate at a conveyance terminal end of the conveyance mechanism, wherein in the transfer step, a liquid is supplied to the placement portion on which the observation object is placed, and the observation object is carried by a flow of the liquid and transferred onto the plate.

Abstract: A holding nozzle is provided with a suction member including a suction portion which comes into contact with a panel and a shaft portion communicated with the suction portion, an accommodation portion in which the shaft portion is accommodated, a suction member support portion supporting the shaft portion such that the suction member is movable with respect to the accommodation portion, a negative pressure connection portion to which a negative pressure generator is connected, and a communication member accommodated in the accommodation portion between the negative pressure connection portion and the suction member support portion and has a hollow portion which is a portion of a flow path through which a fluid is flowed. The communication member includes a first connection portion connected to the negative pressure connection portion, a second connection portion connected to the shaft portion, and a contractible portion installed between the first and second connection portions.

Abstract: A conveying device of the present invention includes a holding unit configured to hold a conveying object, a support member swingably supporting the holding unit, a plurality of hanging members, each distal end of which is connected to the support member so as to hang the holding unit via the support member, reel units to which each proximal end of the plurality of hanging members is connected so as to be capable of feeding and wounding, a base part on which the plurality of reel units are mounted, a guide unit configured to engage with the holding unit, and guide the holding unit to be elevated, and a control unit configured to perform operation control on the reel units so as to feed and wind the hanging member.

Abstract: An alignment device which aligns notch portions of wafers includes mounting tables that hold the wafers, movement units that move the mounting tables, notch portion detection units that detect a circumferential positions of the notch portion, and a controller that controls positions of the mounting tables by the movement units. The mounting tables includes a mounting table main body portion and a pad member attached to an opening in the mounting table main body portion to hold the wafers. The pad member includes the main body portion that is attached to the opening and has a through hole in a center portion thereof, the first annular portion on an end side of the pad member to abut against wafers, and the first collar portion that is integrally provided with the first annular portion and the main body portion and extends toward outside of the main body portion.

Abstract: A part support apparatus for supporting a plurality of parts which form a product by being connected to each other includes a plurality of support robots arranged in a work space and supporting the plurality of parts, a control unit controlling the plurality of support robots, and a storage unit storing a form pattern of each support robot corresponding to a type of a product. Each of the plurality of support robots includes a support unit supporting a part, and a multiaxial robot to which the support unit is attached, and which changes the posture and position of the support unit. The control unit controls the posture and position of each support unit by the multiaxial robot based on the form pattern, such that the plurality of parts are arranged to be connectable to each other.

Abstract: Provided a screw feeding device, in which a buffer mechanism is incorporated between a rod member and a nut member. The screw feeding device includes: a screw shaft; the nut member, which has a flange portion, the rod member, which has a mounting portion facing the flange portion and a hollow portion; and a buffer mechanism, which connects the flange portion and the mounting portion, in which the buffer mechanism includes: a plurality of shafts, a pair of separators, through which the plurality of shafts pass, and which is movable along the plurality of shafts; and an elastic member, provided between the pair of separators, in which the plurality of shafts include: a shaft, fixed to the flange portion; and a shaft fixed to the mounting portion.

Abstract: A machining system includes a machining unit and a moving apparatus configured to move the machining unit. The machining unit includes a rotating tool for rotating about an axis in a vertical direction, an upper surface abutting member configured to be abutted against an upper surface of a work, an end face abutting member configured to be abutted against an end face of the work between an upper edge and an lower edge of the work, and a vertical moving unit configured to change a position of the upper surface abutting member in the vertical direction with respect to the rotating tool. The rotating tool includes a machining portion main body, a first machining portion provided on a lower side of the machining portion main body, and a second machining portion provided on an upper side of the machining portion main body.

Abstract: A conveyance method of conveying a conveyance target object by loading the conveyance target object on a slider, wherein the slider is connected to a ball nut threadably engaged with a ball screw shaft, includes a step of rotating the ball screw shaft by an electric motor, a step of applying a braking force which is a rotation resistance to the ball screw shaft by a non-electric resistance changing unit, and a step of setting at least one of a driving force of the electric motor and the braking force of the resistance changing unit so that the slider will stop when a predetermined external force acts on the slider during conveyance and changes the slider to an overload state regardless of the presence/absence of the conveyance target object loaded on the slider and a weight of the conveyance target object.

Abstract: This invention provides a transfer apparatus for loading/unloading a work into/from a processing apparatus, comprising: a main body being able to move in a horizontal direction; an arm portion pivotally provided with respect to the main body; a hand portion pivotally provided with respect to the arm portion, and configured to grip the work; and a control unit configured to horizontally swing the arm portion and move the main body in order for the hand portion to linearly move the work, when the hand portion facing the processing apparatus loads/unloads the work into/from the processing apparatus.

Abstract: A holding nozzle is provided with a suction member including a suction portion which comes into contact with a panel and a shaft portion communicated with the suction portion, an accommodation portion in which the shaft portion is accommodated, a suction member support portion supporting the shaft portion such that the suction member is movable with respect to the accommodation portion, a negative pressure connection portion to which a negative pressure generator is connected, and a communication member accommodated in the accommodation portion between the negative pressure connection portion and the suction member support portion and has a hollow portion which is a portion of a flow path through which a fluid is flowed. The communication member includes a first connection portion connected to the negative pressure connection portion, a second connection portion connected to the shaft portion, and a contractible portion installed between the first and second connection portions.

Abstract: A working unit includes a tool rotation mechanism, a first turning mechanism turning the tool rotation mechanism about a first axis, and a second turning mechanism turning the tool rotation mechanism and the first turning mechanism about a second axis perpendicular to the first axis. The first turning mechanism includes a motor having a stator connected to the second turning mechanism and a hollow shaft-shaped rotor arranged inside the stator in such a manner that the rotor is capable of rotating about the first axis, and a second rotating body including one arm portion coupled to one end portion of the rotor, the other arm portion coupled to the other end portion of the rotor, and an arm coupling portion that couples the arm portions to each other. The tool rotation mechanism is provided on the second rotating body.

Abstract: A method of manufacturing a component and a component manufacturing apparatus attach an attached part in a predetermined posture decided in advance to a ring-shaped channel formed in an outer circumference of a component main body. While being held by holding portions, a ring-shaped seal body is placed in contact with a tapered portion and has its diameter expanded to at least the outer diameter of the component main body. The seal body elastically deforms from the expanded-diameter state so that its diameter reduces and is attached to the attachment channel in the outer circumferential surface of the component main body while being guided by the holding portions.

Abstract: A vertical moving method of a vertical moving unit on which a conveyance target object is mounted includes steps of causing a non-electric biasing unit to generate a biasing force to raise the vertical moving unit, causing an electric motor unit to generate a thrust in a direction to raise the vertical moving unit or a thrust in a direction to lower the vertical moving unit, and causing an electromagnetic brake unit to generate a braking force to resist a movement of the vertical moving unit. Independently of presence/absence of the object and a weight of the object, the thrust and/or the braking force is controlled such that the vertical moving unit stops when an external force of overload more than a predetermined value acts on the vertical moving unit during a vertical movement.

Abstract: A hand unit of a robot arm includes a U-shaped placement portion on which a semiconductor wafer is placed. The hand unit includes, on one end side of the placement portion, a first support portion configured to support the semiconductor wafer at a first support height and a second support portion configured to support the semiconductor wafer at a second support height, and includes, on the other end side of the placement portion, a third support portion configured to support the semiconductor wafer at the first support height and a fourth support portion configured to support the semiconductor wafer at the second support height. The hand unit further includes a first driving unit configured to move the third support portion and/or the fourth support portion forward and backward with respect to the first support portion and the second support portion.

Abstract: The present invention provides a system that transports a tray in a horizontal attitude, the tray including a plurality of work placement portions arranged in a matrix. The system includes first and second transport units, a transfer device transferring the tray between the first transport unit and the second transport unit, a shooting unit including a line sensor shooting, between the first transport unit and the second transport unit, an image of the tray transferred by the transfer device and a moving device moving the transfer device and the shooting unit in a direction to traverse a plurality of transport lines of the first transport unit.

Abstract: A method of manufacturing produces an assembled product where a ring-shaped seal is attached to a channel in an inner circumferential surface of a ring-shaped component. The method includes: a holding step that moves an engaged portion of the seal inwardly in a radial direction using a deformation member, while restricting movement of the seal in a direction parallel to an inner circumferential wall of the channel, to cause deformation so that the outer diameter of part of the seal aside from the engaged portion becomes smaller than the channel inner circumferential diameter; and an attachment step that attaches the seal to the channel by releasing the seal to restore the seal from the deformation. The attachment step includes releasing the seal by releasing engagement by the deformation member and moving the seal body inside the channel while pressing out the seal body from inside.

Abstract: A manufacturing system for manufacturing a laminated body by coating a first panel with an adhesive in a first working region and bonding the first panel coated with the adhesive and a second panel in a second working region includes a first conveying device in the first working region for conveying the first panel and the second panel, a coating device in the first working region for coating, with the adhesive, the first panel, a bonding device in the second working region for bonding the first panel and the second panel, and a second conveying device in the second working region for conveying the first panel and the second panel to the bonding device. The first conveying device and the second conveying device convey the first panel and the second panel to be bonded to each other as a set.