Patents Assigned to Hirochiku Co., Ltd.
  • Patent number: 6562134
    Abstract: A crystal growth apparatus comprising a heating furnace capable of controlling uniformly the temperature distribution in the same horizontal plane, and a method for producing a single crystal by using the crystal growth apparatus are provided. In the crystal growth apparatus comprising a cylindrical heating furnace (110) having plural heaters (101, 102, 103 and 104) laminated in multi-stage in an axial direction (Z), each heater is disposed for the terminal portions of the adjacent heaters not to be overlapped in the same position, but to be in a mutually separated position, seeing from the axial direction of the heating furnace. Concretely, in case of N (n is a positive integer of three or more) heaters, each heater (101, 102, 103 and 104) is disposed for the terminal portions (110a, 102a, 103a and 104a) of the heaters to be located at each apex of a regular n-gon (n is an integer satisfying 3≦n≦N), seeing from the axial direction Z of the heating furnace.
    Type: Grant
    Filed: June 15, 2001
    Date of Patent: May 13, 2003
    Assignees: Nikko Materials Co., Ltd., Hirochiku Co., Ltd.
    Inventors: Hiroshi Maeda, Ryuichi Hirano, Tetsuya Yamamoto, Akira Hichiwa, Yoshiaki Kubota