Patents Assigned to Hiroshi Mizukami
  • Gas filter
    Patent number: 4902314
    Abstract: Disclosed herein is a gas filter particularly suitable for the filtration of dry gases used in the manufacture of the semiconductors. The gas filter comprises a ceramic honeycomb structural body with numerous gas flow holes and a fine ceramic film coated onto the inner surfaces of the gas flow holes. Filtration is performed by passing the gas to be filtered from the outer peripheral surface of the honeycomb structural body to the gas flow holes.
    Type: Grant
    Filed: May 22, 1989
    Date of Patent: February 20, 1990
    Assignees: Hidetoshi Nakajima, Hiroshi Mizukami, Kuniaki Watanabe
    Inventors: Hiroshi Mizukami, Hideo Tukazaki