Patents Assigned to Hitachi Chemical DuPont Microsystems Ltd.
  • Patent number: 10725379
    Abstract: A resin composition including the following components (a) and (b). (a) A polyimide precursor having a structural unit represented by the following general formula (1); and (b) a compound represented by the following general formula (2): wherein in the formula R1 is a tetravalent organic group, R2 is a divalent organic group and R3 and R4 are independently a hydrogen atom, an alkyl group, a cycloalkyl group or a monovalent organic group having a carbon-carbon unsaturated double bond.
    Type: Grant
    Filed: December 13, 2013
    Date of Patent: July 28, 2020
    Assignee: Hitachi Chemical DuPont MicroSystems, Ltd.
    Inventors: Keishi Ono, Tetsuya Enomoto, Masayuki Ohe, Keiko Suzuki, Kazuya Soejima, Etsuharu Suzuki
  • Patent number: 9751984
    Abstract: A polyimide precursor including a structural unit represented by the following general formula (1) in a ratio of 50 mol % or more based on the total structural units. In the general formula (1), A is a tetravalent organic group represented by the following general formula (2a), a tetravalent organic group represented by the following general formula (2b), or a tetravalent organic group represented by the following general formula (2c), and B is a divalent organic group represented by the following general formula (3).
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: September 5, 2017
    Assignee: HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD.
    Inventors: Tetsuya Enomoto, Keishi Ono, Masayuki Ohe, Keiko Suzuki, Kazuya Soejima, Etsuharu Suzuki
  • Patent number: 9274422
    Abstract: A photosensitive resin composition including: (a) a polybenzoxazole precursor; (b) a photosensitizer; (c) a solvent; (d) a cross-linking agent; and (e) a heterocyclic compound including a hydroxyl group, an alkoxy group or a carboxyl group within a molecule.
    Type: Grant
    Filed: June 13, 2012
    Date of Patent: March 1, 2016
    Assignee: HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD.
    Inventors: Tomonori Minegishi, Shigeki Katogi
  • Publication number: 20150353685
    Abstract: A polyimide precursor including a structural unit represented by the following general formula (1) in a ratio of 50 mol % or more based on the total structural units. In the general formula (1), A is a tetravalent organic group represented by the following general formula (2a), a tetravalent organic group represented by the following general formula (2b), or a tetravalent organic group represented by the following general formula (2c), and B is a divalent organic group represented by the following general formula (3).
    Type: Application
    Filed: December 19, 2013
    Publication date: December 10, 2015
    Applicant: HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD.
    Inventors: Tetsuya Enomoto, Keishi Ono, Masayuki Ohe, Keiko Suzuki, Kazuya Soejima, Etsuharu Suzuki
  • Publication number: 20150337116
    Abstract: A resin composition including the following components (a) and (b). (a) A polyimide precursor having a structural unit represented by the following general formula (1); and (b) a compound represented by the following general formula (2): wherein in the formula R1 is a tetravalent organic group, R2 is a divalent organic group and R3 and R4 are independently a hydrogen atom, an alkyl group, a cycloalkyl group or a monovalent organic group having a carbon-carbon unsaturated double bond.
    Type: Application
    Filed: December 13, 2013
    Publication date: November 26, 2015
    Applicant: Hitachi Chemical DuPont MicroSystems, Ltd.
    Inventors: Keishi ONO, Tetsuya ENOMOTO, Masayuki OHE, Keiko SUZUKI, Kazuya SOEJIMA, Etsuharu SUZUKI
  • Patent number: 9134608
    Abstract: A positive photosensitive resin composition including: (a) a resin capable of being dissolved in an aqueous alkaline solution; (b) a compound having two or more oxetanyl groups; (c) a diazonaphthoquinone compound; and (d) a solvent.
    Type: Grant
    Filed: January 18, 2011
    Date of Patent: September 15, 2015
    Assignee: HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD.
    Inventors: Masashi Kotani, Masayuki Ooe, Taku Konno, Tomonori Minegishi, Keishi Ono
  • Patent number: 8975192
    Abstract: A method is provided for manufacturing a semiconductor device having a heat-resistant resin film with flip-chip connection structure using a solder bump or a gold bump and an epoxy resin compound laminated thereon, in which adhesiveness is improved particularly after exposure to high temperature and high humidity environments for a long period of time, thereby enhancing the reliability of the semiconductor device. The method, in accordance with the present invention, for manufacturing a semiconductor device having a heat-resistant resin film formed on a semiconductor element and an epoxy resin compound layer laminated thereon, comprises the steps of carrying out a plasma treatment on a surface of the heat-resistant resin film on which the epoxy resin compound layer is laminated using a nitrogen atom-containing gas containing at least one of nitrogen, ammonia, and hydrazine.
    Type: Grant
    Filed: August 22, 2006
    Date of Patent: March 10, 2015
    Assignee: Hitachi Chemical Dupont Microsystems Ltd.
    Inventors: Yasunori Kojima, Toshiaki Itabashi
  • Patent number: 8871422
    Abstract: A negative-type photosensitive resin composition which is good in sensitivity and resolution, a pattern forming method by the use thereof wherein a pattern which can be developed in an alkali aqueous solution, is excellent in sensitivity, resolution and heat resistance and has a good shape is obtained, and highly reliable electronic parts are provided. The negative-type photosensitive rein composition includes (a) a polymer that has a phenolic hydroxyl group at a terminal and is soluble in the alkali aqueous solution, (b) a compound that generates an acid by irradiating active light, and (c) a compound that can be crosslinked or polymerized by an action of the acid.
    Type: Grant
    Filed: June 20, 2006
    Date of Patent: October 28, 2014
    Assignee: Hitachi Chemical DuPont Microsystems Ltd.
    Inventor: Tomonori Minegishi
  • Patent number: 8852726
    Abstract: A photosensitive polymer composition includes (a) a polyamide having a repeating unit represented by the following general formula (I): wherein U represents a tetravalent organic group, V represents a bivalent organic group and p is an integer representing a number of the repeating unit; (b) a compound which generates an acid upon receiving light; and (c) a compound represented by the following general formula (II): wherein m and n are each independently integer of 1 or 2, Rs are each independently hydrogen, alkyl group or acyl group, and R1 and R2 each independently represents fluoroalkyl group having 1 to 3 carbon atoms.
    Type: Grant
    Filed: June 21, 2012
    Date of Patent: October 7, 2014
    Assignee: Hitachi Chemical Dupont Microsystems Ltd.
    Inventors: Masayuki Ooe, Hiroshi Komatsu, Yoshiko Tsumaru, Dai Kawasaki, Kouji Katou, Takumi Ueno
  • Patent number: 8796411
    Abstract: The polyimide precursor composition of the present invention is characterized in comprising a polyimide precursor having a structure formed by reacting a diamine component (A) containing a fluorine-containing aromatic diamine (a1) represented by the following chemical formula (I) (in the formula (I), R1 and R2 are each independently selected from —H, —(CF2)n—CF3, and —O(CF2)n—CF3 (n is an integer of 0 or more and 7 or less), and at least one of R1 and R2 is a fluorine-containing group) and trans-1,4-cyclohexyldiamine (a2) with an acid dianhydride component (B) containing an aliphatic tetracarboxylic dianhydride (b1) and an aromatic tetracarboxylic dianhydride (b2). Use of the composition of the present invention provides a polyimide film and a transparent flexible film having high transparency, low thermal expansion properties, low birefringent properties, and high heat resistance.
    Type: Grant
    Filed: January 26, 2009
    Date of Patent: August 5, 2014
    Assignee: Hitachi Chemical DuPont Microsystems, Ltd.
    Inventors: Yuichi Kaneya, Yumiko Arakawa, Keiko Suzuki
  • Patent number: 8765868
    Abstract: A resin composition includes: (A) a polymer having a structural unit shown by the formula (I), and an acidic functional group or a group derived therefrom at both of the terminals; wherein X1 is a di- to octa-valent organic group, Y1 is a di- to octa-valent organic group, R1 is a hydrogen atom or an organic group having 1 to 20 carbon atoms, R2 is a hydrogen atom or a monovalent organic group, when plural R1s or R2s exist, the plural R1s or R2s may be the same or different, p and q are independently an integer of 0 to 4, l and m are independently an integer of 0 to 2, and n is an integer of 2 or more indicating the number of structural units; (B) a solvent; and (C) a compound shown by formula (II) wherein R3 is a monovalent organic group.
    Type: Grant
    Filed: April 30, 2010
    Date of Patent: July 1, 2014
    Assignee: Hitachi Chemical DuPont Microsystems, Ltd.
    Inventor: Hajime Nakano
  • Patent number: 8758977
    Abstract: A negative-type photosensitive resin composition which is good in sensitivity and resolution, a pattern forming method by the use thereof wherein a pattern which can be developed in an alkali aqueous solution, is excellent in sensitivity, resolution and heat resistance and has a good shape is obtained, and highly reliable electronic parts are provided. The negative-type photosensitive rein composition includes (a) a polymer that has a phenolic hydroxyl group at a terminal and is soluble in the alkali aqueous solution, (b) a compound that generates an acid by irradiating active light, and (c) a compound that can be crosslinked or polymerized by an action of the acid.
    Type: Grant
    Filed: January 13, 2011
    Date of Patent: June 24, 2014
    Assignee: Hitachi Chemical DuPont MicroSystems, Ltd.
    Inventor: Tomonori Minegishi
  • Publication number: 20140120462
    Abstract: A photosensitive resin composition including: (a) a polybenzoxazole precursor; (b) a photosensitizer; (c) a solvent; (d) a cross-linking agent; and (e) a heterocyclic compound including a hydroxyl group, an alkoxy group or a carboxyl group within a molecule.
    Type: Application
    Filed: June 13, 2012
    Publication date: May 1, 2014
    Applicant: Hitachi Chemical DuPont Microsystems, Ltd.
    Inventors: Tomonori Minegishi, Shigeki Katogi
  • Patent number: 8614051
    Abstract: A photosensitive resin composition for an interlayer insulating film or a protective film of a substrate for circuit formation, which includes a polymer (a) having a structural unit shown by the formula (A) and a compound (b) which generates a radical when irradiated with active rays and has a structure shown by the following formula (B).
    Type: Grant
    Filed: June 28, 2012
    Date of Patent: December 24, 2013
    Assignee: Hitachi Chemical Dupont Microsystems, Ltd.
    Inventors: Tomonori Minegishi, Rika Nogita, Dai Kawasaki, Keiko Suzuki, Taku Konno
  • Publication number: 20130143011
    Abstract: A photosensitive resin composition including: (a) a polyamide acid; (b) a compound (b1) having 4 or more of a methylol group, a methoxymethyl group and the both thereof, or a compound (b2) represented by the following formula (2); and (c) a photopolymerization initiator.
    Type: Application
    Filed: November 7, 2012
    Publication date: June 6, 2013
    Applicant: HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD.
    Inventor: Hitachi Chemical DuPont MicroSystems, Ltd.
  • Patent number: 8420291
    Abstract: Provided are a positive photosensitive resin composition that is developable in an alkaline aqueous solution and gives a good shaped pattern that is excellent in heat resistance and mechanical property, a method for producing the pattern and an electronic component. The positive photosensitive resin composition contains (a) polybenzoxazole or a polybenzoxazole precursor polymer having a structural unit represented by either a general formula (1) or (2) and satisfying conditions (i) and/or (ii), (b) a compound that generates an acid by being irradiated with active light ray and (c) a compound having a structure represented by a general formula (3) crosslinkable or polymerizable with said component (a).
    Type: Grant
    Filed: October 29, 2008
    Date of Patent: April 16, 2013
    Assignee: Hitachi Chemical Dupont Microsystems, Ltd.
    Inventors: Tomonori Minegishi, Tomoko Kawamura, Masayuki Ohe, Yuki Nakamura
  • Publication number: 20120328856
    Abstract: A photosensitive resin composition for an interlayer insulating film or a protective film of a substrate for circuit formation, which includes a polymer (a) having a structural unit shown by the formula (A) and a compound (b) which generates a radical when irradiated with active rays and has a structure shown by the following formula (B).
    Type: Application
    Filed: June 28, 2012
    Publication date: December 27, 2012
    Applicant: HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD.
    Inventors: Tomonori MINEGISHI, Rika NOGITA, Dai KAWASAKI, Keiko SUZUKI, Taku KONNO
  • Publication number: 20120288798
    Abstract: A positive photosensitive resin composition including: (a) a resin capable of being dissolved in an aqueous alkaline solution; (b) a compound having two or more oxetanyl groups; (c) a diazonaphthoquinone compound; and (d) a solvent.
    Type: Application
    Filed: January 18, 2011
    Publication date: November 15, 2012
    Applicant: HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD.
    Inventors: Masashi Kotani, Masayuki Ooe, Taku Konno, Tomonori Minegishi, Keishi Ono
  • Patent number: 8304149
    Abstract: A photosensitive polymer composition, having (a) a polymer selected from polyimide precursors and polyimides having an acid group protected by a protecting group and having no amino group (—NH2) at the end; and (b) a compound that generates an acid when exposed to light and capable of deprotecting the protecting group from the acid group, is employed to form layers of a semiconductor device.
    Type: Grant
    Filed: December 7, 2010
    Date of Patent: November 6, 2012
    Assignees: Hitachi Chemical Dupont Microsystems Ltd., Hitachi Chemical Dupont Microsystems L.L.C.
    Inventors: Masataka Nunomura, Masayuki Ooe, Hajime Nakano, Yoshiko Tsumaru, Takumi Ueno
  • Patent number: 8304160
    Abstract: A photosensitive resin composition for an interlayer insulating film or a protective film of a substrate for circuit formation, which includes a polymer (a) having a structural unit shown by the formula (A) and a compound (b) which generates a radical when irradiated with active rays and has a structure shown by the following formula (B).
    Type: Grant
    Filed: April 13, 2010
    Date of Patent: November 6, 2012
    Assignee: Hitachi Chemical Dupont Microsystems, Ltd.
    Inventors: Tomonori Minegishi, Rika Nogita, Dai Kawasaki, Keiko Suzuki, Taku Konno