Abstract: A magnetic head loading mechanism for loading two magnetic heads 2(A) and 2(B), each of which is attached at a tip of respective one of supporting arms 3 and 3, onto a surface of a magnetic disc 1 to be tested being rotated with high rotation speed, comprising: two adopters 71(A) and 71(B), on which are fixed the supporting arms 3 and 3 in a detachable manner; two head position adjusting mechanisms 74(A) and 74(B) for rotating the adopters 71(A) and 71(B) so as to bring the supporting arms 3 and 3 into either an escaping condition in which they are far away from the surfaces of the magnetic disc 1 each by a rotation angle of 90.degree.

Abstract: An off-track characteristics tester for testing an off-track characteristics of an MR head, according to the present invention, comprises spiral scan type read-out unit for reading out a test data recorded on a track of a disk by spirally scanning the track by the MR head while shifting the MR head radially of the disk at such a shifting rate that the MR head traverses a maximum measuring pitch .DELTA.R necessary to obtain data of an off-track profile curve a plurality of times, average value calculation unit responsive to a read-out signal from the read-out unit to calculate an average value TAA of the test data from the read-out unit every revolution of the disk and a memory for storing the average value TAA for each revolution of the disk together with the radial positions of the MR head, wherein the data of the off-track profile curve is obtained from the average value TAA and the data of the radial positions stored in the memory in every revolution.

Abstract: Functional devices for inspecting disks are arranged around a turntable at equal spacings of angle 2n.pi./(n+m) in the order of the operations they perform. The turntable is rotated both in forward direction by angle 2n.pi./(n+m) and in reverse direction by angle 2m.pi./(n+m) such that the total angle of rotations in forward direction is equal to that of rotations in reverse direction when the necessary operations have completed without causing the turntable to rotate fully once.

Abstract: A wafer surface inspection method and device including a low angle light receiving system having an elevation angle less than 30.degree. with reference to the wafer surface, and a high angle light receiving system having an elevation angle equal to or larger than 30.degree., scans the wafer with a laser beam, receives scattered light to perform extraneous substance detection in response to the scanning, and detects wafer defects only by the high angle light receiving system, and sticking extraneous substances by either the low angle receiving system or by both the low angle light receiving system and the high angle light receiving system.

Abstract: The surface defect test method and tester according to the invention comprises a sensitivity calibration disk formed with n (n is an integer equal to or larger than 2) false defect rows each including 3 or more false defects each formed in a radial or peripheral direction provided in the peripheral direction of the calibration disk at a predetermined angle pitch.

Abstract: A disk texturing apparatus for texturing surfaces of a magnetic disk or the like with cross-pattern grooves. The texturing apparatus is basically constituted by a rotational drive having a spindle for supporting and rotating a disk, and a tape transport mechanism for moving a texturing tape across and in pressed with a texturing surface of said disk. The spindle of the rotational drive mechanism is arranged to hold a disk in an eccentrically deviated position off the rotational axis of the rotational drive. As a result, the disk is revolved along an eccentrically deflecting orbit around the rotational axis of said rotational drive while being rotated with the spindle, moving in and out in radial directions in a degree commensurate with the amount of deviation from said rotational axis to form cross-pattern grooves on the disk surface.

Abstract: Method and apparatus for processing substrates through a number of wet treatments. A substrate is set on a substrate rotating means for rotation in a horizontal face-up position, within a housing which is open on its top side. By a treating liquid feed means having a treating liquid feed nozzle member, at least one kind of treating liquid is supplied onto upper surfaces of the substrate being rotated by the substrate rotating means. The treating liquid feed nozzle member is supported on a movable arm for displacement to and from an operative position vertically confronting the substrate and a receded standby position away from the substrate on the substrate rotating means. Located face to face with lower surfaces of the substrate is a nozzle means which supplies a fluid to the lower side of the substrate.

Abstract: A surface defect inspection device according to the present invention is provided with an average value calculating means in which an article corresponding to an object to be inspected having a multiplicity of substantially uniformly distributed standard particles deposited thereon is scanned in a main scanning direction as a defect inspection object, detection values of the standard particles at every detecting pixel are obtained based on detection signals obtained from an optical sensor at respective scanning positions while assuming the standard particles as being defects and average values of every detecting pixel with regard to the detection values obtained at the respective scanning positions are calculated, and a shading correction means in which detection values of every detecting pixel obtained when the object to be inspected is inspected are subjected to shading correction for every detecting pixel based on the calculated average values of every detecting pixel.

Abstract: The tester and the test method for testing an eccentricity of a head turnout zone of a magnetic disk determine a turnout zone as acceptable or unacceptable by spirally scanning a turnout zone of a magnetic disk with a laser spot by rotating the magnetic disk and continuously moving either the laser spot radially of the magnetic disk or the magnetic disk radially thereof, obtaining a detection signal having amplitude corresponding to an intensity of a scattering light from the magnetic disk irradiated with the laser spot, extracting a first waveform of the detection signal corresponding to an intermediate region between an inside variation region in which an inside boarder line of the turnout zone radially of the magnetic disk by radial movement of the turnout zone caused by an ecentricity of the turnout zone and an outside variation region in which an outside boarder line of the turnout zone radially of the magnetic disk by the radial movement of the turnout zone caused by the eccentricity of the magnetic dis

Abstract: A detector is provided to optically monitor the outer periphery of a wafer rotated by rotation of a rotary stage, so as to detect how much the center of the wafer placed on the rotary inspection stage is offset from the rotational center of the rotary stage as well as an angular position, on the stage, of a V-shaped notch formed in the wafer. From the detected eccentricity of the wafer, it is determined whether a precise positioning operation, using at least three positioning pins, to locate the center of the wafer at the rotational center of the rotary stage should be performed or not. When the detected eccentricity is so great as to necessitate the precise positioning operation, one of the positioning pins is caused to fit into the V-shaped notch of the wafer on the basis of the detected angular position of the notch and then the precise positioning of the wafer is performed using the other two positioning pins.

Abstract: The present invention resides, in a magnetic disk certifier for detecting one of a spike error and a positive modulation error on the basis of a read signal obtained by reading out by an MR head a test data written on a track of a magnetic disk as a first error of said magnetic disk and detecting one of a missing error and a negative modulation error as a second error, a method and apparatus for detecting a thermal asperity error of said MR head, by of detecting the first error and the second error in positions on said track, the positions having a recording length of a plurality of bits of the test data and judging a thermal asperity error when the first error and the second error are detected in one and the same position of the track.

Abstract: An extraneous substance inspection apparatus for a patterned wafer, according to the present invention, comprises an optical sensor having a plurality of detecting portions arranged to receive the scattering light corresponding to pixels and produce the detection signal corresponding to the respective pixels, a delay circuit responsive to the detection signal from the optical sensor for delaying the detection signal by a predetermined time and a judging circuit for judging an absence or presence of contaminant by comparing an output of the delay circuit with the detection signal from said optical sensor, wherein the wafer is inclined by a predetermined angle with respect to a direction parallel to the arranging direction of the detecting portions of the optical sensor and the predetermined time corresponds to a difference in scan time between a position of one pixel and substantially the same position as that of the one pixel in one chip of another pixel in another chip adjacent to that chip, the another pixe

Abstract: A magnetic disk certifier according to the present invention is featured by comprising a write circuit for writing a test data having a period which is 1/n of a bit period of the test data, error of which is to be detected, in a magnetic disk, where n is an integer equal to or larger than 2, a read-out circuit for reading out the test data written in the magnetic disk, a comparator circuit for producing a detection signal by comparing a read-out signal read out from the read-out circuit with a predetermined signal or a predetermined reference level and an error detector circuit for detecting an error by receiving the detection signal from the comparator circuit with a period which is n times the bit period of the test data written in the magnetic disk, a bit data of an error detected by the error detector circuit being used as an error signal by converting each bit of the bit data into n bits.

Abstract: A disk chuck mechanism of the present invention reliably chucks a disk on an upper end surface of a cylinder by providing a short rod penetrating the cylinder, coupling a circular plate and a plate member to opposite ends of the rod, providing a biasing member such as coil springs for biasing the rod in the direction in which the rod is moved away from the cylinder, pulling the rod down from the cylinder by biasing force of the biasing member to expand a ring member having a diameter smaller than an annular groove and to fit it in the annular groove, to thereby uniformly press a side surface of a center opening of the disk with an outer peripheral surface of the cylinder.

Abstract: The improved for measuring the flying height of a magnetic head comprises a clear disk made of single-crystal sapphire, a spindle on which said disk is mounted for rotation, a mechanism for loading the magnetic head above one surface of said disk, measuring optics having a photoelectric converter that receives the light produced by interference of reflected light from said one surface of said disk with reflected light from the surface of said magnetic head as a result of application of light to said one surface through the other surface of said disk, and which converts the received interference light to an electric signal by means of said photoelectric converter, and a processing unit for calculating the flying height of said magnetic head in response to said electric signal from said measuring optics.

Abstract: The improved DNA base sequencer comprising an electrophoresis plate having a gel electrolyte layer held between two glass plates, one of which is partially cut away on the top edge in the direction of width, an assay compartment for accommodating said electrophoresis plate in a vertically erect position, a lower reservoir of a buffer solution in which the lower part of the gel electrolyte layer in the electrophoresis plate is to be immersed, an upper reservoir of a buffer solution in which the upper part of said electrolyte layer is to be immersed, photoexciting laser light applying means by which laser light is emitted from a lateral side of the electrophoresis plate in such a way that it crosses the lanes in said plate at right angles, and fluorescence detecting means by which the fluorescence emitted from a DNA fragment illuminated with the laser light is picked up and converted to an electric signal, and the apparatus is characterized in that a sharkstoothcomb made of a water-swellable material is inserte

Abstract: An extraneous substance inspection apparatus includes a level conversion circuit for converting a level of an extraneous substance detection signal obtained from a position in a first chip into one of multi-valued levels. A judging circuit determines the existence or absence of an extraneous substance by comparing a signal indicative of one of the multi-valued levels with another signal indicative of a converted level obtained by converting a detection signal detected at a similar position in another chip adjacent to the first chip.

Abstract: An IC package transfer mechanism for transferring molded IC packages to and from a flat tray with a large number of IC holder nests in an array and an IC magazine adapted to accommodate a large number of IC packages in a row within a tubular housing to be turned into a tilted position in loading and unloading operations to let IC packages slide into or out of the cylindrical housing automatically by gravity.

Abstract: A surface inspection apparatus of the present invention comprises an optical sensor having a plurality of detecting portions arranged in a sub-scan direction, the detecting portions being responsive to the scattering light for producing the detection signals correspondingly to respective pixels, a detection optical system including an objective lens and disposed between the optical sensor and the thing to be inspected, a projection optical system for irradiating the thing to be inspected with the laser beam having a cross sectional area large enough to cover the scattering light to be received by the plurality of the detecting portions through the detection optical system and an inspection device responsive to the detection signals for inspecting the surface of the thing to be inspected, wherein one of the detection optical system lens and the optical sensor is mounted such that a setting axis thereof is aligned in a plane perpendicular to an optical axis of the detection optical system lens with a light rece

Abstract: A bump disk including a standard protrusion having a predetermined height and a plurality of reference protrusions positioned either on substantially the same radial line as the standard protrusion or on a circumferential line having substantially the same radial distance as the standard protrusion under a predetermined positional relationship with respect to the standard protrusion, a method of calibrating the floating height of a protrusion detection head by making use of a standard circumferential speed determined with the bump disk and a glide tester using such calibration method.