Patents Assigned to Hitachi Instrument Engineering Co., Ltd.
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Patent number: 5296669Abstract: A specimen to be irradiated with an electron beam is supported by a heating member secured detachably to a specimen holder and the heating member, a power supply therefor and electric conductive lines for conducting a electric power from the power supply to the heating member are integrated into the specimen holder.Type: GrantFiled: May 28, 1993Date of Patent: March 22, 1994Assignees: Hitachi, Ltd., Hitachi Instruments Engineering Co, Ltd.Inventors: Hiroyuki Kobayashi, Takeo Kamino, Masahiro Tomita
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Patent number: 5281827Abstract: A column section is disposed within a thermostatic chamber within a clean room, a section for analog controlling each portion of the column section is disposed within the clean room and outside of the thermostatic chamber, and a section for digital controlling the analog control section is disposed outside of the clean room.Type: GrantFiled: September 20, 1991Date of Patent: January 25, 1994Assignees: Hitachi, Ltd., Hitachi Instrument Engineering Co., Ltd.Inventors: Masamichi Kawano, Masahide Okumura, Haruo Yoda, Yukinobu Shibata, Tadao Konishi
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Patent number: 5278407Abstract: A secondary-ion mass spectrometry apparatus using a field limiting method includes an optical system for primary ions, a sample chamber, and an optical system for secondary ions, and a total ion monitor (TIM) interposed between an electric sector and a magnetic sector of the optical system for secondary ions. A field-limited image (or TIM image) from the TIM can be observed or monitored continually by a CRT, thereby making it possible to grasp quantitatively the charging state of a sample surface. The apparatus may further include an adjuster for adjusting quantatively the charging state of the sample surface.Type: GrantFiled: April 24, 1992Date of Patent: January 11, 1994Assignees: Hitachi, Ltd., Hitachi Instrument Engineering Co., Ltd.Inventors: Yoshinori Ikebe, Hifumi Tamura, Hiroyuki Sumiya, Akemi Furuki
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Patent number: 5276499Abstract: A spectrophotometer which takes out monochromatic lights from lights from light sources by using spectroscopes and transmits the monochromatic lights through a sample and detects the transmitted lights by sensors includes a plurality of dispersing elements in the spectroscope which bear the dispersion of different wavelength ranges or a plurality of sensors which bear the detection of different wavelength ranges in order to widen a measurement wavelength range; and means for correcting the difference between measured values obtained when the different dispersing elements were used or the difference between measured values obtained when the different sensors were used at one wavelength in overlap wavelength regions between different wavelength ranges so as to be set to zero.Type: GrantFiled: October 2, 1990Date of Patent: January 4, 1994Assignees: Hitachi, Ltd., Hitachi Instrument Engineering Co., Ltd.Inventors: Sadao Minakawa, Masaru Enomoto, Masaya Kojima
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Patent number: 5270212Abstract: This invention relates to an apparatus for analyzing cells in a biological liquid sample, such as blood, in which apparatus a flow passage in a sample pretreatment system can be shortened with a simple construction. A sample metering chamber, a mixing chamber and a measurement liquid extracting chamber are formed in a rotary sliding member of a pretreatment portion. The rotary sliding member is intermittently rotated so as to shift a sample from one chamber to another to perform a necessary treatment. Fluorescence or scattering light with respect to the sample, mixed with a reagent in the pretreatment portion, is detected by a flow cell.Type: GrantFiled: February 26, 1992Date of Patent: December 14, 1993Assignees: Hitachi, Ltd., Hitachi Instrument Engineering Co., Ltd.Inventors: Hideyuki Horiuchi, Shinichi Sakuraba, Toshio Kaneko, Nobuyuki Tatara, Ryohei Yabe, Hiroshi Ohki, Isao Yamazaki, Ryo Miyake
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Patent number: 5236847Abstract: A method for analyzing amino acids in biological liquids wherein a buffer liquid including unknown components to be analyzed is introduced to a separation column for separating amino acids. After reaction of the buffer liquid in a reactor, the amino acids are detected by a photometer. The flow rate of the buffer liquid is maintained at a predetermined value until the asparagine, glutamine acid and glutamine are separated from the separation column and the flow rate of the buffer liquid is varied stepwise or in linear gradient after separation of the above three components from the separation column.Type: GrantFiled: November 26, 1991Date of Patent: August 17, 1993Assignees: Hitachi, Ltd., Hitachi Instrument Engineering Co., Ltd.Inventors: Hiroshi Satake, Yoshio Fujii, Kohta Kimiyoshi
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Patent number: 5206517Abstract: An electron beam lithographic method in which a sample is irradiated with an electron beam, wherein an extreme point of a contour of a pattern is calculated and a lithographic area is divided into a first region that is surrounded by straight lines drawn from the extreme point in parallel with the x-axis and the y-axis of the sample and by said pattern, and second regions in order to be lithographed.Type: GrantFiled: November 27, 1991Date of Patent: April 27, 1993Assignees: Hitachi, Ltd., Hitachi Instrument Engineering Co., Ltd.Inventors: Yukinobu Shibata, Ikuo Takada, Akira Hirakawa, Tadao Konishi
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Patent number: 5185523Abstract: A mass spectrometer for analyzing ultra trace element using plasma ion source comprising, a plasma generating means for ionizing sampling gas by generating plasma, a vaccum chamber for taking in ions of the sampling gas from a hole of the vacuum chamber, an ion lens and a mass analyzing portion, and an ion detector for detecting the ions which are passed through the ion lens and the mass analyzing portion, wherein further comprising, a moving mechanism for moving said plasma generating means according to a vacuum degree measured in the vacuum chamber so as to make the sensitivity of the mass spectrometer higher.Type: GrantFiled: March 10, 1992Date of Patent: February 9, 1993Assignees: Hitachi, Ltd., Hitachi Instrument Engineering Co., Ltd.Inventors: Masatoshi Kitagawa, Yukio Okamoto, Takayuki Ono, Tetuya Shinden
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Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope
Patent number: 5008537Abstract: A composite apparatus is disclosed which includes in combination a secondary ion mass spectrometry instrument and a scanning electron microscope. A liquid metal ion source and an ion source other than the liquid metal ion source are installed in the same apparatus so that an ion beam emitted from the liquid metal ion source and an ion beam emitted from the ion source other than the liquid metal ion source are aligned with each other on a primary beam axis which is an optical axis of an irradiating system. The liquid metal ion source is disposed in rear of a primary ion separating device which mass-separates the ion beam emitted from the ion source other than the liquid metal ion source. Further, an electron gun is installed in the same apparatus so that an electron beam emitted from the electron gun is aligned with the ion beam on the primary beam axis.Type: GrantFiled: September 20, 1989Date of Patent: April 16, 1991Assignees: Hitachi, Ltd., Hitachi Instrument Engineering Co., Ltd.Inventors: Hiroshi Toita, Hifumi Tamura, Issei Tobita, Hiroshi Iwamoto -
Patent number: 4992661Abstract: A method of neutralizing an accumulated charge on a surface of a specimen which is examined in a scanning electron microscope (SEM) or a scanning ion microprobe mass analyzer (IMA), utilizes an electrically conductive thin film deposited on a part of the specimen surface. The charge is due to irradiation by a primary charged particle beam from the SEM or IMA. The thin film is made conductivity with a specimen mount mounting the specimen, and the irradiating range of the primary beam covers at least a part of the thin film. Thus, the accumulated charge can be neutralized, thereby a resolution of the SEM being improved due to applying higher accelerating voltage for the primary beam, and measured data of higher reliability being obtained in the IMA.Type: GrantFiled: August 17, 1988Date of Patent: February 12, 1991Assignees: Hitachi, Ltd., Hitachi Instrument Engineering Co., Ltd.Inventors: Hifumi Tamura, Yoshinori Ikebe, Katsuhiko Muroyama, Hiroyuki Sumiya
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Patent number: 4939365Abstract: A transmission electron microscope for irradiating a specimen with an electron beam, wherein the electron beam passed through the specimen is imaged on an imaging screen by a magnifying lens system. The electron microscope includes a deflector for deflecting the electron beam to thereby scan a specimen with the electron beam, and a memory for storing a range within which the specimen is to be preliminarily scanned with the electron beams and the number of scans to be performed. The specimen is preliminarily scanned with the electron beam within the preliminary scan range for the number of times on the basis of the corresponding data read out from the memory.Type: GrantFiled: August 30, 1988Date of Patent: July 3, 1990Assignees: Hitachi, Ltd., Hitachi Instrument Engineering Co., Ltd.Inventors: Hiroyuki Kobayashi, Teruo Suzuki, Akio Mori, Sadahiko Okamura, Shoji Kamimura
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Patent number: 4737787Abstract: A two-wire communication system comprising a transmitting unit having constant current characteristics for controlling an output current thereof on the basis of a signal supplied from a sensor, a receiving unit for receiving a control signal to control the sensor, a load resistor and power supply connected in series with the transmitting unit via a two-wire transmission path, and a communication unit so connected in parallel to the load resistor as to convey the output current of the transmitting unit to the process side and control a current from the power supply transmitted onto the transmission path on the basis of information supplied from the process side.Type: GrantFiled: October 16, 1986Date of Patent: April 12, 1988Assignees: Hitachi, Ltd., Hitachi Instrument Engineering Co., Ltd.Inventors: Yukio Ito, Kazuji Yamada, Yasushi Shimizu, Shigeyuki Kobori