Abstract: A charged particle beam exposure apparatus includes an irradiator for irradiating a sample with a charged particle beam, an analog controller for analog controlling the charged particle beam, a digital controller for digital controlling the analog controller, and a digital transmission path connecting the analog controller to the digital controller. The analog controller is disposed inside a room, and the digital controller is disposed outside the room.

Abstract: The object of the invention is to provide an electron beam lithography apparatus and a method thereof which, while maintaining a predetermined pattern drawing accuracy, enables the pattern drawing speed to be improved still further. An electron beam lithography apparatus comprising exposing an electron beam 2 from an electron gun 1, interrupting the electron beam 2 by means of a blanker 6, further deflecting the electron beam 2 by applying a voltage to a deflector 7, wherein the electron beam lithography apparatus is characterized by selecting one of a first predetermined period of time required for the voltage of the deflector 7 to be stabilized and a second period of time which is shorter than the foregoing first period of time, and wherein the blanker 6 is operated according to the result of the foregoing selection.

Abstract: A test strip automatic supply device has: a cylindrical container 11 provided with a slit 15 which is formed in a side wall thereof so as to contain an elongate test strip; a container-supporting table having, in an upper portion thereof, a semi-cylindrical concave surface provided with an opening 20 which is formed in a middle portion of the concave surface so as to allow a test strip fitted in the slit of the container 11 to fall through and be taken out; and a carrying stage 31 which receives and transports a test strip falling from the slit 15. While the transporting stage 31 is transporting a test strip, an optical detector finds whether the test strip is faced up or down. The device has such a function that a side-reversing mechanism flips it over during transportation if it is face down. An operator only has to put test strips in the container. The tests strips are automatically let out of the container one at a time.

Abstract: A liquid chromatograph mass spectrometer includes a liquid chromatograph unit for performing liquid chromatography, an atomizer having a controllable temperature for heating and atomizing a liquid flowing out of the liquid chromatograph unit during liquid chromatography to produce an atomized liquid, an ionizing device for ionizing the atomized liquid to produce an ionizing sample, a mass spectrometer for analyzing the ionized sample, a storage device for successively storing liquid chromatography conditions and respective atomizer temperatures used for the liquid chromatography conditions for past measurements performed with the liquid chromatograph mass spectrometer, an input device for inputting a current liquid chromatography condition for a current measurement, a retrieving device for retrieving from the storage device a liquid chromatography condition nearest to the current liquid chromatography condition among the liquid chromatography conditions stored in the storage device, and the atomizer temperatu

Abstract: In a magnetic resonance imaging system, object movement along an axis associated with readout magnetic gradient pulses is detected, quantized and compensated for in reconstructing an image slice. Phase-encoding magnetic gradient pulses in the sequence are arranged so that low-order phase-encoding pulses are distributed substantially uniformly during scanning time. In an N-slice acquisition, object movement is determined y arranging each of the N sets of phase-encoding gradient pulses comprising a multi-slice sequence such that at each scan time, at least one of the N sets contains a low-order phase-encoding gradient pulse. During data acquisition, echoes returned from low-order phase-encoding gradient pulses have sufficient signal-to-noise ratios to identify object position along the readout axis. Identification of object movement from one slice may be valid for other slices relatively adjacent physically in the object, so that all N slices are movement corrected during image reconstruction.

Abstract: Apparatus for cancelling magnetic fields for cancelling a leakage magnetic field from a static magnetic field generation assembly are disposed outside the static magnetic field generation assembly. A magnetic shield made of a magnetic substance is disposed between the static magnetic field generating assembly and the cancelling magnetic field apparatus. The cancelling magnetic field generation apparatus is of a cryostatless type.

Abstract: A specimen to be irradiated with an electron beam is supported by a heating member secured detachably to a specimen holder and the heating member, a power supply therefor and electric conductive lines for conducting a electric power from the power supply to the heating member are integrated into the specimen holder.

Abstract: A column section is disposed within a thermostatic chamber within a clean room, a section for analog controlling each portion of the column section is disposed within the clean room and outside of the thermostatic chamber, and a section for digital controlling the analog control section is disposed outside of the clean room.

Abstract: A secondary-ion mass spectrometry apparatus using a field limiting method includes an optical system for primary ions, a sample chamber, and an optical system for secondary ions, and a total ion monitor (TIM) interposed between an electric sector and a magnetic sector of the optical system for secondary ions. A field-limited image (or TIM image) from the TIM can be observed or monitored continually by a CRT, thereby making it possible to grasp quantitatively the charging state of a sample surface. The apparatus may further include an adjuster for adjusting quantatively the charging state of the sample surface.

Abstract: A spectrophotometer which takes out monochromatic lights from lights from light sources by using spectroscopes and transmits the monochromatic lights through a sample and detects the transmitted lights by sensors includes a plurality of dispersing elements in the spectroscope which bear the dispersion of different wavelength ranges or a plurality of sensors which bear the detection of different wavelength ranges in order to widen a measurement wavelength range; and means for correcting the difference between measured values obtained when the different dispersing elements were used or the difference between measured values obtained when the different sensors were used at one wavelength in overlap wavelength regions between different wavelength ranges so as to be set to zero.

Abstract: This invention relates to an apparatus for analyzing cells in a biological liquid sample, such as blood, in which apparatus a flow passage in a sample pretreatment system can be shortened with a simple construction. A sample metering chamber, a mixing chamber and a measurement liquid extracting chamber are formed in a rotary sliding member of a pretreatment portion. The rotary sliding member is intermittently rotated so as to shift a sample from one chamber to another to perform a necessary treatment. Fluorescence or scattering light with respect to the sample, mixed with a reagent in the pretreatment portion, is detected by a flow cell.

Abstract: A method for analyzing amino acids in biological liquids wherein a buffer liquid including unknown components to be analyzed is introduced to a separation column for separating amino acids. After reaction of the buffer liquid in a reactor, the amino acids are detected by a photometer. The flow rate of the buffer liquid is maintained at a predetermined value until the asparagine, glutamine acid and glutamine are separated from the separation column and the flow rate of the buffer liquid is varied stepwise or in linear gradient after separation of the above three components from the separation column.

Abstract: An electron beam lithographic method in which a sample is irradiated with an electron beam, wherein an extreme point of a contour of a pattern is calculated and a lithographic area is divided into a first region that is surrounded by straight lines drawn from the extreme point in parallel with the x-axis and the y-axis of the sample and by said pattern, and second regions in order to be lithographed.

Abstract: A mass spectrometer for analyzing ultra trace element using plasma ion source comprising, a plasma generating means for ionizing sampling gas by generating plasma, a vaccum chamber for taking in ions of the sampling gas from a hole of the vacuum chamber, an ion lens and a mass analyzing portion, and an ion detector for detecting the ions which are passed through the ion lens and the mass analyzing portion, wherein further comprising, a moving mechanism for moving said plasma generating means according to a vacuum degree measured in the vacuum chamber so as to make the sensitivity of the mass spectrometer higher.

Abstract: When the center of an object of interest imaged and the center of a display screen or image area deviate from each other, a Fourier transformation imaging method includes (a) a step of representing the amount of deviation of those centers from each other by the amount of deviation in a frequency encoding direction and the amount of deviation in a phase encoding direction, (b) a step of converting each of the amounts of deviation in the frequency and phase encoding directions into a value calculated in terms of the amount of rotation of the phase angle of a measured resonance signal, (c) a step of correcting the amount of rotation of the phase angle of the measured resonance signal on the basis of the values obtained by the conversion, and (d) a step of Fourier-transforming the corrected signal to display an image in which there is no deviation or the center of the object of interest is located at the center of the image area.

Abstract: A secondary ion mass analyzing apparatus is suitable for a depth directional analysis of a specimen. The apparatus includes means for forming an image of said secondary ions, an aperture disposed on a position in which the secondary ion image is formed, means for detecting the secondary ions which have passed through the aperture and for converting the detected ions into electrical signals, and means for displaying an image of said aperture based on the electrical signals. In such a manner, the aperture is disposed on the secondary ion image forming position. The image of the aperture is displayed on the image displaying apparatus by using the secondary ions which have passed through the aperture. If the ion image is not formed on the position of the aperture, the contour of the aperture image would be unclear while if the ion image is formed on the position of the aperture, the contour of the aperture image would be clear.

Abstract: An electron beam lithography apparatus comprising an electron lens, a deflector, a reflective electron detector of marks on a stage or a specimen thereon when the deflector scans the marks, and a means for memorizing high order polynomial equations and calculating a correcting value of the deflector controlling means based on the high order polynomial equations, wherein all coefficients of the high order polynomial equation are calculated when the electron beam lithography apparatus starts up, and after then, coefficient of the first order term is calculated from the position signals of the marks frequently in a short cycle.

Abstract: A composite apparatus is disclosed which includes in combination a secondary ion mass spectrometry instrument and a scanning electron microscope. A liquid metal ion source and an ion source other than the liquid metal ion source are installed in the same apparatus so that an ion beam emitted from the liquid metal ion source and an ion beam emitted from the ion source other than the liquid metal ion source are aligned with each other on a primary beam axis which is an optical axis of an irradiating system. The liquid metal ion source is disposed in rear of a primary ion separating device which mass-separates the ion beam emitted from the ion source other than the liquid metal ion source. Further, an electron gun is installed in the same apparatus so that an electron beam emitted from the electron gun is aligned with the ion beam on the primary beam axis.

Abstract: A method of neutralizing an accumulated charge on a surface of a specimen which is examined in a scanning electron microscope (SEM) or a scanning ion microprobe mass analyzer (IMA), utilizes an electrically conductive thin film deposited on a part of the specimen surface. The charge is due to irradiation by a primary charged particle beam from the SEM or IMA. The thin film is made conductivity with a specimen mount mounting the specimen, and the irradiating range of the primary beam covers at least a part of the thin film. Thus, the accumulated charge can be neutralized, thereby a resolution of the SEM being improved due to applying higher accelerating voltage for the primary beam, and measured data of higher reliability being obtained in the IMA.

Abstract: A transmission electron microscope for irradiating a specimen with an electron beam, wherein the electron beam passed through the specimen is imaged on an imaging screen by a magnifying lens system. The electron microscope includes a deflector for deflecting the electron beam to thereby scan a specimen with the electron beam, and a memory for storing a range within which the specimen is to be preliminarily scanned with the electron beams and the number of scans to be performed. The specimen is preliminarily scanned with the electron beam within the preliminary scan range for the number of times on the basis of the corresponding data read out from the memory.