Abstract: A plasma treatment apparatus for forming a thin film on a substrate in a vacuum vessel includes a magnetic field generator which can be positioned inside or outside the vacuum vessel, and a microwave source. The magnetic field strength is controllable such that an electron cyclotron resonance (ECR) area is defined near the substrate. The magnetic field generator can be arranged so that plasma and reactive gas introduction ports are on the microwave introduction side of the ECR area and the substrate is on the opposite side of the ECR area. Alternatively, a gas introduction port can be positioned such that reactive gas is introduced into the ECR area or onto the substrate.

Abstract: An industrial compact synchrotron radiation source includes, for the purpose of prolonging lifetime of a charged particle beam, beam absorbers made of a material having a low photodesorption yield and disposed inside a bending section/vacuum chamber at at least positions upon which the synchrotron radiation is irradiated, and electrically conductive beam stabilizers disposed at positions inside the bending section/vacuum chamber which are distant by a predetermined distance from an orbit of the charged particle beam toward the outer circumferential wall of the bending section/vacuum chamber.

Abstract: An industrial compact synchrotron radiation source includes, for the purpose of prolonging lifetime of a charged particle beam, beam absorbers made of a material having a low photodesorption yield and disposed inside a bending section/vacuum chamber at at least positions upon which the synchrotron radiation is irradiated, and electrically conductive beam stabilizers disposed at positions inside the bending section/vacuum chamber which are distant by a predetermined distance from an orbit of the charged particle beam toward the outer circumferential wall of the bending section/vacuum chamber.

Abstract: A device for removing a cladding material from a bottom portion of a control rod guide tube of a nuclear reactor. A rotor tube is removably mounted in a housing of a control rod drive of the nuclear reactor and has at least its forward end portion hydraulically insertable into the bottom portion of the control rod guide tube through an opening located in a lower portion of the control rod guide tube for inserting the control rod drive. The rotor tube is provided at the forward end portion thereof with a foldable rotary brush and cleaning water supply nozzles. A rotary drive shaft is extending through the rotor tube for rotating the rotary brush. The cladding material deposited on the bottom portion of the control rod guide tube that has become radioactive can be readily and positively removed therefrom with a small volume of water while enabling the risk of exposure to radiation to be minimized at a time the operation of cleaning the bottom portion of the control rod guide tube is performed.

Abstract: A diagnostic apparatus for diagnosising of a valve device in a turbine system comprises at least one of a pressure sensor for sensing hydraulic pressure in a hydraulic cylinder for driving a valve body of the valve device and a position sensor for sensing the displacement of the valve body, and a processing device for processing the output signal from the above-mentioned at least one sensor. The processing device has an offset computing device which receives a signal representing the actual operating state of the valve device obtained on the basis of the output signal from the at least one sensor and a signal corresponding to a reference value obtained under the normal operating state of the valve device. The offset computing device is operable to compute the offset between the signals received thereto. A judging device is provided for judging as to whether or not there is a symptom of a sticking in the valve device, in accordance with the output signal from the offset computing device.

Abstract: For rotating the runner of a fluid machine in compressed air atmosphere in the runner chamber after shutting off working water and feeding compressed air to the runner chamber to move the liquid level therein downwardly below the runner while discharging water remaining in the outer peripheral portion of the runner through a leak-water exhaust pipe following starting of pump-operation, an inlet valve opening detector is mounted and operatively connected to a leak-water exhaust valve controller for controlling a leak-water exhaust valve. Stable operation of the fluid machine in spinning-in-air mode can be achieved by opening the leak-water exhaust valve by means of the leak-water exhaust valve controller following lapse of a given period of time after the inlet valve is fully closed, to permit the water remaining in the outer peripheral portion of the runner to be discharged through the leak-water exhaust pipe.