Abstract: A laser beam delivery system for transforming a laser energy profile into a desired laser beam output energy profile. The laser beam delivery system comprises a laser for generating a laser beam along a beam path, at least one extra-cavity harmonic generation element being located along the beam path for generating harmonic multiples of a beam input frequency, and an extra-cavity beam expansion element, located before the at least one harmonic generation element, for expanding and collimating the laser beam prior to the laser beam being multiplied by the at least one harmonic generation element. The beam expansion element may be a refractive lens.

Abstract: Aligning and testing alignment of optical elements in a laser beam delivery system using non-visible radiation. An alignment mirror replaces a beam redirection mirror and includes a fluorescing substrate and a dielectric coating on an incident face of the fluorescing substrate that reflects a major part of an incident laser beam along a next leg of the beam path and transmits a part of the beam into the fluorescing substrate, which is transmissive to visible radiation and fluoresces when irradiated by the beam to emit a visible light image from a back face of the alignment mirror. An alignment target on the back face indicates a preferred point of incidence of the beam on the alignment mirror for a desired alignment of the at least one laser beam. A lens may be tested and the properties of the lens determined by use of a fluorescing target plate.