Abstract: A flexure stage with modularized flexure units for convenient manufacturing, assembly and repair is provided. The flexure stage comprises a base, a platform separated from the base, and a plurality of flexure units disposed between the base and the platform. Each flexure unit comprises a first section, a second section, and a third section. The first section is located on the base. The second section is connected with the platform and separated from the first section. The third section is coupled with the first section and the second section through the first bending part and the second bending part respectively wherein the first bending part and the second bending part comprises flexibility in different axial directions.