Abstract: A temperature sensing apparatus may include a body, a tube combined with the body, and a temperature sensor. The temperature sensor is configured to measure a temperature of an object, in the tube, without being in contact with the object. The body may include an air chamber formed adjacent to a temperature sensing region of the object.
Type:
Application
Filed:
October 25, 2019
Publication date:
January 21, 2021
Applicants:
SK hynix Inc., HJS ENG CO., LTD.
Inventors:
Tae Ho LEE, Kwang Mun LEE, Du Cheal HWANG
Abstract: A method of producing washing hydrogen water in an embodiment, includes: a step of storing ammonia water in a first tank; a step of transferring the ammonia water from the first tank to a second tank; a step of diluting the transferred ammonia water with ultrapure water in the second tank; a step of mixing the diluted ammonia water into hydrogen water; and a washing step of washing an inside of the first tank by ultrapure water to remove fine particles derived from ammonia generated in the first tank.
Type:
Application
Filed:
July 14, 2016
Publication date:
January 19, 2017
Applicants:
NOMURA MICRO SCIENCE CO., LTD., ACM RESEARCH (SHANGHAI), INC., HJS ENG CO., LTD.
Inventors:
Takayuki JIZAIMARU, David H. WANG, Hwang Du CHEOL