Abstract: A low-cost, durable silicon carbide member for a plasma processing apparatus. The silicon carbide member for a plasma processing apparatus can be obtained by processing a sintered body which is produced with a method in which metal impurity is reduced to more than 20 ppm and 70 ppm or less, and an ?-structure silicon carbide power having an average particle diameter of 0.3 to 3 ?m and including 50 ppm or less of an Al impurity is mixed with 0.5 to 5 weight parts of a B4C sintering aid, or with a sintering aid comprising Al2O3 and Y2O3 with total amount of 3 to 15 weight parts, and then a mixture of the ?-structure silicon carbide power with the sintering aid is sintered in an argon atmosphere furnace or a high-frequency induction heating furnace.

Abstract: An electrostatic chuck can be manufactured at low cost and can securely prevent arcing even if the main body of the electrostatic chuck is thin. This electrostatic chuck is provided with an electrostatic chuck main body, an arcing prevention member, and a metal base member. The electrostatic chuck main body and the metal base member are provided with a plurality of vertical cooling gas holes. The arcing prevention member includes: a ceramic plate-shaped body through which a plurality of fine holes 20-100 ?m in diameter pass; and an exterior member that secures the ceramic plate-shaped body and is disposed in an upper part of the vertical cooling gas holes. The ceramic plate-shaped body is thicker than the electrostatic chuck main body.

Abstract: A low-cost, durable silicon carbide member for a plasma processing apparatus. The silicon carbide member for a plasma processing apparatus can be obtained by processing a sintered body which is produced with a method in which metal impurity is reduced to more than 20 ppm and 70 ppm or less, and an ?-structure silicon carbide power having an average particle diameter of 0.3 to 3 ?m and including 50 ppm or less of an Al impurity is mixed with 0.5 to 5 weight parts of a B4C sintering aid, or with a sintering aid comprising Al2O3 and Y2O3 with total amount of 3 to 15 weight parts, and then a mixture of the ?-structure silicon carbide power with the sintering aid is sintered in an argon atmosphere furnace or a high-frequency induction heating furnace.

Abstract: A silicon carbide member for a plasma processing apparatus is obtained by mixing an ?-silicon carbide powder having an average particle size of 0.3 to 3 ?m, with an amount of metal impurities in the ?-silicon carbide powder reduced to 20 ppm or less, and a sintering aid comprising B4C in amount of 0.5 to 5 weight parts or Al2O3 and Y2O3 in total amount of 3 to 15 weight parts; sintering a mixture of the ?-silicon carbide powder and the sintering aid in an argon atmosphere furnace or a high-frequency dielectric heating furnace; and then processing the resulting sintered body. The resulting silicon carbide member for a plasma processing apparatus is low cost and durable.

Abstract: A silicon carbide member for a plasma processing apparatus is obtained by mixing an ?-silicon carbide powder having an average particle size of 0.3 to 3 ?m, with an amount of metal impurities in the ?-silicon carbide powder reduced to 20 ppm or less, and a sintering aid comprising B4C in amount of 0.5 to 5 weight parts or Al2O3 and Y2O3 in total amount of 3 to 15 weight parts; sintering a mixture of the ?-silicon carbide powder and the sintering aid in an argon atmosphere furnace or a high-frequency dielectric heating furnace; and then processing the resulting sintered body. The resulting silicon carbide member for a plasma processing apparatus is low cost and durable.

Abstract: The nozzle member of a fluid nozzle includes at least one through hole that is parallel to a center axis, wherein a diameter dimension of the through hole is 10 ?m to 100 ?m, a length-to-diameter ratio (L/D) of the through hole is 5 or above, and the nozzle member is formed of ceramics having relative density of 95% or above. The nozzle member including a plurality of minute through holes is manufactured by performing extrusion or cast molding in such a way that a molded body includes a filament of synthetic resin, carbon, or metal in a direction of the center axis of the molded body, and then defatting/sintering the molded body after removing the filament or, when the filament is formed of synthetic resin or carbon, defatting/sintering the molded body under oxidizing atmosphere to evaporate and remove the filament without removing the filament from the molded body.

Abstract: The nozzle member of a fluid nozzle includes at least one through hole that is parallel to a center axis, wherein a diameter dimension of the through hole is 10 ?m to 100 ?m, a length-to-diameter ratio (L/D) of the through hole is 5 or above, and the nozzle member is formed of ceramics having relative density of 95% or above. The nozzle member including a plurality of minute through holes is manufactured by performing extrusion or cast molding in such a way that a molded body includes a filament of synthetic resin, carbon, or metal in a direction of the center axis of the molded body, and then defatting/sintering the molded body after removing the filament or, when the filament is formed of synthetic resin or carbon, defatting/sintering the molded body under oxidizing atmosphere to evaporate and remove the filament without removing the filament from the molded body.

Abstract: The straightness of the piston of a water jet loom plunger pump for discharging water under a high pressure is maintained to allow its smooth movement with respect to the cylinder. For this, a roller guide is arranged at a reciprocal piston actuating mechanism unit. By forming a bent tube at a water discharging passage from the cylinder to a conduit, moreover, the resistance to the water to be discharged from the cylinder is reduced. The piston is given a degree of freedom to move with respect to a drive member connected to a pump cam and a lever. This enables the piston to move with the least resistance in the cylinder.

Abstract: A sub-nozzle in an air injection type weaving machine in which fluffing or the like caused by contact thereof with warp etc. does not occur, and for which its manufacture and control is facilitated. A sub-nozzle jetting a high-speed air flow for acceleration toward weft thrown from a main nozzle to between warps when they are raised and lowered to form shed opening comprises a holder connected to the side of a supply source of compressed air and a nozzle head connected to the holder, where at least the nozzle head is integrally formed by a high-strength glass material and occurrence of warp damage or wear of the nozzle head per se is restrained by the smoothness of its surface.

Abstract: A picking device for a water-jet loom comprises a nozzle body connected to a pressurized water source and provided with a plurality of axial nozzle holes, a plurality of spools fitted respectively in the axial nozzle holes and each provided with an axial through-hole through which to pass a weft yarn, a spool driving mechanism for individually or sequentially driving the spools for axial reciprocation or for turning alternately in opposite directions within a fixed angular range, and orifice chips having orifices defining straightening spaces for straightening the flow of the pressurized water around the front ends of the spools together with the circumferences of the front ends of the spools. A fluid passage connected to each of the orifices can be opened and closed by axial reciprocation or by turning alternately in opposite directions in the given angular range of the spool.