Abstract: The invention pertains to a probe for sensing the characteristics of a surface of a workpiece which contains a probe tip that is movably held and prestressed essentially in the direction of the tip (Z-direction) and mounted without play to a first acceleration transducer. The first acceleration transducer transforms the movements of the probe tip and consequently the measurement data into acceleration data, with the first acceleration transducer being movably held and prestressed in the direction of the tip (Z-direction) and fixedly connected to the probe tip. A first integrator performs double integration with respect to time of the acceleration data from the first acceleration transducer, thereby forming longitudinal measurement data which correspond to the features of the sensed surface. The probe is thus able to sense the shape as well as the undulations, or roughness of the surface of a workpiece and outputs the features in the form of a corresponding measurement voltage.

Abstract: A switching apparatus with an adjusting drive, preferably piezoelectrical, which is connected with a device producing a supply voltage. A second adjusting drive, which is preferably constructed in the same manner as the first adjusting drive, and to which a length measuring device is coupled, which scans the adjusting movement of the adjusting element of the second adjusting drive and produces an output signal, which is connected in a linear manner with the adjusting movement of the adjusting element of the first adjusting drive, is connected with the outlet of the supply voltage producing device. By means of this linear connection, errors which are brought about by hysteresis, drift or temperature in the adjusting drive, which is preferably piezoelectrical, are eliminated.

Abstract: An acoustic scanning microscope uses damping of a resonant acoustic oscillator and an acoustic near-field effect. In a preferred embodiment, a 32 KHz tuning fork serving as an acoustic oscillator with a 50 nm point achieves a vertical resolution of 5 nm and a horizontal resolution of 50 nm in the case of a minimum distance of approximately 50 nm. Frequency or amplitude variation of the resonant acoustic oscillator can be used. The acoustic near-field effect is dependent on the coupling medium, e.g., air, and the pressure, e.g., normal pressure.

Abstract: Optical retro-reflector in particular for purposes of interferometry. It has the form of a sphere and is fashioned from an optically refractive material, the index of refraction of which is at least approximately 2, but by preference precisely 2. The reflecting surface of the sphere is coated with a film of reflecting material, preferably vapor-deposited metal. The retro-reflector can be manufactured cheaply and with a high level of surface quality. It has a high degree of reflecting power.

Abstract: A device for the coupling of lasers, diodes or the like with one another or with light-conductive fibers or of such fibers with one another, having two support bodies for the holding of a laser, of a diode or of one fiber in the directio of one optical axis. Between the two support bodies, there is positioned an intermediary body which is guided, with one of the two support bodies, in the direction of the optical axis and connected in a displaceable manner by means of sliding surfaces. The contact surfaces extend perpendicularly to the optical axis. By means of the contact surfaces, a precise rotational adjustment of the support bodies is possible. Fluid adhesive material can be placed between the contact surfaces by means of the capillary effect, and thus a very precise fixing of the support bodies and intermediary body, and thus of the optical parts to one another, can thereby be attained.

Abstract: A laser optical apparatus for measuring the distance between the apparatus and a measuring surface which comprises an optical measuring reflector on said measuring surface, a converting transformer for converting the position of said reflector into corresponding electrical signals and an indicator for said signals. The improvement comprises a first optical interferometer having a measuring wave guide coupled with a reference wave guide and a second optical interferometer also having measuring and reference wave guides. The length of the second measuring wave guide is different from the length of the second reference wave guide and a computer is used to compare output electrical signals the value of which depend upon this difference. The apparatus also includes a device to correct the wave length of the laser beam by controlling the electrical current to the laser.

Abstract: A device for measuring the distance between the device and a measuring surface, with an optical interferometer, which has a measuring wave guide, one end of which is connected with a laser and the other of which is directed to optical measuring reflector which is positioned on the measuring surface or is connected with the same in an effective manner, which reflects the light back into the measuring wave guide. The interferometer furthermore has a reference wave guide which is coupled with the measuring wave guide at a coupling point, has a mirror on its one end, and on its other end, a photoelectrical converter, which is connected with an indicator device for indicating the electrical output signal of the photoelectrical converter. The reference wave guide is coupled, preferably by means of a polarizing beam splitter, with a branch wave guide, the end of which is connected with an additional photoelectrical converter. The reference wave guide has a phase adjustment device.

Abstract: Device for the contact-free measurement of a distance from a surface, particularly for scanning the contour of a surface of a workpiece along a given measuring path, comprising a measuring body enclosing optoelectronic means for transmitting light to the surface to be measured and converting the light reflected by such surface into an electrical signal as a function of the distance from the surface. The measuring body is supported on a stand and is movable in the direction of measurement. The optoelectronic means comprise a focus position measuring system and an optoelectronic position scanning unit for scanning the position of the measuring body relative to the supporting stand.

Abstract: A dimension-measuring probe for fine measurements having a probe lever pivoted between its ends to provide an indicator arm and a sensing arm on opposite sides of the pivot. The sensing arm terminates in a pivot point. Spring means separate from the probe lever is provided next to the probe lever and connects to the probe point. The spring means serves to urge the probe point into contact with a work piece being measured. This structure eliminates stress on the sensing arm which tends to bend the arm and cause errors in measurement.

Abstract: A device for measuring small distances, provided with a sensing tip mounted to be movable in the direction of the length to be measured, a transducer for converting the movements of the sensing tip into corresponding electric signals, and indicating means to indicate such signals. The transducer comprises an optical interferometer provided with a measuring waveguide. One end of the waveguide is connected to a laser and the other end to optical means for directing the light onto a measuring mirror disposed at a distance. The light is reflected by the mirror back to the optical means. The measuring mirror is connected to the sensing tip. The interferometer further includes a reference waveguide linked to the measuring waveguide. The reference waveguide has a mirror disposed at one end and a photoelectric transduer at the other end. The transducer is connected to the indicating means for indicating the output signals of the transducer.

Abstract: A device for measuring the contour of a surface along a scanning line. The device includes an electro-mechanical transducer with a scanner arm on whose free end there is a sensing tip. The other end of the arm is connected, via a pivot bearing whose axis of rotation is parallel to the surface to be scanned and vertical to the scanning line, with an advance mechanism. The advance mechanism moves the pivot bearing along the scanning line. The transducer emits, corresponding to excursions of the sensing tip transverse to the scanning line, a measurement signal that is fed into a recording device. The recording device records the electrical signal on the basis of distance or time. A control device is provided into which the electrical measurement signal is fed. On the basis of the magnitude of the electrical measurement signal, the control device produces an advance or a lag of the advance mechanism or of the time axis of the recording device relative to the advance of the advance mechanism.

Abstract: A device for measuring small distances, provided with a sensing tip mounted to be movable in the direction of the length to be measured, a transducer for converting the movements of the sensing tip into corresponding electric signals, and indicating means to indicate such signals. The transducer comprises an optical interferometer provided with a measuring waveguide. One end of the waveguide is connected to a laser and the other end to optical means for directing the light onto a measuring mirror disposed at a distance. The light is reflected by the mirror back to the optical means. The measuring mirror is connected to the sensing tip. The interferometer further includes a reference waveguide linked to the measuring waveguide. The reference waveguide has a mirror disposed at one end and a photoelectric transducer at the other end. The transducer is connected to the indicating means for indicating the output signals of the transducer.

Abstract: In an apparatus for measuring the eccentricity of an eccentric bearing face having an axis of rotation, a rotary motion and a perimeter, the apparatus comprises a length measurement gauge, mounting means for mounting the length measurement gauge, means for guiding the movement of the length measurement gauge, in which the guiding means comprises a follower and two bearing tips, and means for applying the bearing tips to the eccentric bearing face. The mounting means for mounting the length measurement gauge functions to (a) maintain the length measurement gauge in the radical direction during rotary motion, and (b) enable the length measurement gauge to move perpendicularly to the axis of rotation. The guiding means functions to guide the movement of the length measurement gauge in the direction of the rotary motion of the eccentric bearing face.