Abstract: A sputter trap formed on at least a portion of a sputtering chamber component has a plurality of particles and a particle size distribution plot with at least two different distributions. A method of forming a sputter trap having a particle size distribution plot with at least two different distributions is also provided.

Abstract: A variable-vane assembly for a variable nozzle turbine comprises a nozzle ring supporting a plurality of vanes affixed to vane arms that are engaged in recesses in the inner edge of a unison ring. The unison ring is rotatable about the axis of the nozzle ring so as to pivot the vane arms, thereby pivoting the vanes in unison. A plurality of guide pins for the unison ring are inserted into apertures in the nozzle ring and are rigidly affixed therein such that the guide pins are non-rotatably secured to the nozzle ring with a guide portion of each guide pin projecting axially from the face of the nozzle ring. Each guide portion defines a shoulder radially overlapping the inner edge of the unison ring such that the unison ring is restrained by the guide pins against excessive movement in both radial and axial directions.

Abstract: An alarm trend summary display system and method can utilize an alarm trend list that works together with an alarm summary list. A set of rows in the alarm trend list can be organized in a top-to-bottom manner. A set of alarm indicators within each row in the alarm trend list can be arranged in a right-to-left horizontal arrangement. The set of alarm indicators can be aligned with most recent alarms appearing on a right side of the alarm trend list. The specific alarm indicators can be selected in the alarm trend list, so that a corresponding item can be highlighted in the alarm summary list, if the alarms are active. Hence, the system and method can allow an operator to see when alarms occur, their sequence, relations and priority, which aid the operators cope with inevitable alarm floods.

Abstract: An alarm system and method for (1) assisting a user in arming and disarming an alarm system when locking and unlocking an entry door, (2) automatically locking an entry door when arming the alarm system, and/or (3) remotely controlling an electronic lock in an entry door.