Abstract: An apparatus for fabricating a three-dimensional nano/micro structure is provided in the present invention. The apparatus includes a laser source for providing a laser beam, a light-splitting system for generating at least a first light beam and a second light beam from the laser beam, a lens for focusing the first light beam and the second light beam on a focus so as to form an interference pattern thereon and a holder for carrying a substrate having plural first and second nano/micro particles therein. Through the present invention, the first and second nano/micro particles are formed as a two-dimensional structure corresponding to the interference pattern to be further deposited on the substrate, so that the three-dimensional nano/micro structure is successively formed thereby with a high efficiency and precision.

Abstract: An apparatus for fabricating a nano/micro structure is provided in the present invention. The apparatus includes a chamber having a separation device for separating the chamber into a first subchamber and a second subchamber, a dispersion device connected to the first subchamber, an optical driving device disposed next to the first chamber and outside the chamber and an alignment device disposed on the separation device for connecting the first subchamber and the second subchamber. Through the present invention, a plurality of particles are dispersed in the first subchamber via the dispersion device, and further driven and guided to a substrate provided in the second subchamber via the optical driving device and the dispersion device, so that a three-dimensional nano/micro structure on the substrate quickly and precisely.