Abstract: Provided is a small-sized less expensive light-intensity measuring apparatus for measuring a xenon excimer lamp that radiates a light beam having a central wavelength of 172 nm for an intensity. The light-intensity measuring apparatus of the present invention comprises a photoelectric converting means 23, preferably a photodiode, having photosensitivity in the range of from 800 to 1,000 nm, an operating means 25 for relatively determining the intensity of a light beam having a central wavelength of 172 nm depending upon an output of the photoelectric converting means 23 and a transmitting means 26 for transmitting the light intensity determined with the operating means 25.

Abstract: An ultraviolet light beam irradiating apparatus of the present invention has a bed for supporting a work in atmosphere, an ultraviolet light irradiation light source for irradiating the surface of the work with an ultraviolet light beam having a wavelength of 175 nm or shorter, and inert gas inflow structure for allowing an inert gas, preferably nitrogen, helium or argon, into a space in the atmosphere above the work surface of the work. The inert gas is allowed to flow into the space, whereby the oxygen concentration between the ultraviolet light irradiation light source and the work surface is decreased, so that the absorption of the ultraviolet light beam is decreased.

Abstract: Disclosed is a dielectric barrier excimer lamp which is easy to handle, less expensive and improved in ultraviolet light beam irradiation efficiency to electric power and ultraviolet light beam irradiation efficiency to a work.

Abstract: An ultraviolet ray irradiation apparatus has a turntable which mounts a substance to be processed, a driving source which rotates and drives the turntable, a filter which adjusts light quantity of an ultraviolet light beam that reaches a surface to be processed of a substance W to be processed in accordance with shapes of an ultraviolet beam passing region. In the filter, the shape of the ultraviolet light beam passing region is symmetrical for a center line for a length direction of the irradiating range of the ultraviolet light beam. At least a portion near a center of the irradiating range of the ultraviolet light beam of each line segment that forms a boundary of the ultraviolet light beam passing region in a width direction of the ultraviolet light beam passing region is substantially expressed by a quadratic curve that a distance r in the length direction of the irradiating range of the ultraviolet light beam on the basis of the center line is variable.