Abstract: Contaminant is prevented from migrating from a gripping hand and contaminating a substrate case after cleaning the substrate case. The apparatus cleans, in a state with no substrate, a substrate case C which holds a substrate, provided with a booth 10 which forms a clean space, provided with cleaning tanks 40, 50 which hold and clean the parts of the substrate case C in a separated status in the booth 10, provided with a conveyance mechanism 60 which grips part of the substrate case C by a gripping hand 70 and conveys them to and from the cleaning tanks 40, 50, making the gripping hand 70 stand by at a standby position Q in the booth 10 during cleaning of the substrate case C, and provided with a cleaning means 80 for cleaning the gripping hand 70 during cleaning of the parts. The cleaning means 80 is provided with a spray nozzle 81 which sprays a gas toward the gripping hand 70 and an exhaust fan 82 which exhausts the gas from the inside of the booth 10.

Abstract: Parts of a substrate case can be separated and cleaned inside a tank body while making the cleaning solution evenly reach it. A substrate case C which is provided with a base Mb and shell Ms and holds a substrate inside is cleaned in a state with no substrate.

Abstract: Movement from a carrying table to a support table can be prevented from becoming complicated and made simpler and positioning on the support table can be easily performed.

Abstract: Contaminant which sticks to an outer pod which is exposed to the outside air is prevented from contaminating an inner pod and the two can be cleaned so the cleaning precision can be improved. A substrate case C which is provided with an inner pod N which holds a substrate at the inside and an outer pod M which holds the inner pod N at the inside is cleaned in a state with no substrate. A booth 10 which forms a clean space is provided. Inside the booth 1, a first cleaning tank 40 which cleans the parts of the outer base Mb and outer shell Ms of the outer pod M in a separated state and a second cleaning tank 50 which holds and cleans the parts of the inner base Nb and inner shell Ns of the inner pod N in a separated state are provided. A conveyance mechanism is provided with conveys these parts to the corresponding first cleaning tank 40 and second cleaning tank 50.

Abstract: Parts of a substrate case can be separated and cleaned inside a tank body while making the cleaning solution evenly reach it. A substrate case C which is provided with a base Mb and shell Ms and holds a substrate inside is cleaned in a state with no substrate.

Abstract: Movement from a carrying table to a support table can be prevented from becoming complicated and made simpler and positioning on the support table can be easily performed.

Abstract: Contaminant which sticks to an outer pod which is exposed to the outside air is prevented from contaminating an inner pod and the two can be cleaned so the cleaning precision can be improved. A substrate case C which is provided with an inner pod N which holds a substrate at the inside and an outer pod M which holds the inner pod N at the inside is cleaned in a state with no substrate. A booth 10 which forms a clean space is provided. Inside the booth 1, a first cleaning tank 40 which cleans the parts of the outer base Mb and outer shell Ms of the outer pod M in a separated state and a second cleaning tank 50 which holds and cleans the parts of the inner base Nb and inner shell Ns of the inner pod N in a separated state are provided. A conveyance mechanism is provided with conveys these parts to the corresponding first cleaning tank 40 and second cleaning tank 50.

Abstract: An apparatus and method for inspecting whether marking of a target chip in a wafer has been performed normally are provided. The apparatus includes a voltage application detector which detects application of a voltage to an external circuit, an image pickup unit which captures an image, and a controller which controls the image pickup unit to capture an image at at least one predetermined point when the application of the voltage is detected by the voltage application detector and determines whether the marking of the target chip has been performed normally based on the captured image. Accordingly, extra time is not required to inspect whether the marking of the target chip in the wafer has been performed normally and the inspection is performed without using a prober operation program.

Abstract: In an ion blower 1 of the present invention, an opening/closing door 13 opens downward substantially by 90 degrees, so that discharge needles 16 are directed upward. In this case, since the direction of the discharge needles 16 do not intersect a blower body 10, at the time of maintenance, when the discharge needle 16 is pulled out, fingers and the hand move upward, and do not collide against the blower body 10 and the opening/closing door 13.

Abstract: The present invention relates to a discharge unit for an ac ionizer that supplies positive and negative ions, which are generated by corona discharge by applying an ac high voltage to a discharge needle, by air toward an object to be neutralized. A capacitor (C) includes an electrode piece (12) connected to the discharge needle (3), a dielectric (11a) surrounding the electrode piece (12), and an electrode cylinder (9) substantially in a cup shape surrounding the dielectric (11a), and the ac high voltage is applied to the discharge needle (3) via the capacitor (C). Accordingly, the capacitor (C) can have a capacitance for generating a specified quantity of positive and negative ions.

Abstract: The present invention relates to a DC type ionizer comprising a positive electrode 13P and a negative electrode 13N, an alternating current power supply 10, a rectifying and smoothing circuit 11, and high voltage generation circuits 12P and 12N that apply a high direct current constant voltage of positive polarity to the positive electrode 13P and apply a high direct current constant voltage of negative polarity to the negative electrode 13N, respectively, and a fan 14 that sends positive and negative ions generated by corona discharge around each of the electrodes 13P and 13N, in the direction of a target of static electricity removal.

Abstract: A static electricity removal device that removes static electricity by supplying positive and negative ions to a target of static electricity removal, comprising a surface potential measuring probe that measures a surface potential of the target of static electricity removal, wherein a potential detector (11a) that constitutes a surface potential measuring probe (11) and a conductive cap (13) placed so as to surround the potential detector (11a) in a non-contact state are provided and a potential generated in the cap (13) by charges of a target of static electricity removal (30) or ions supplied from a static electricity removal device (20) is detected by the potential detector (11a) and sent out to a control circuit (24) within the static electricity removal device (20) as a feedback signal.

Abstract: A neutralization apparatus 1 according to the present invention is a DC gas injection type neutralization apparatus which efficiently neutralizes a large subject to be neutralized at high speed without generating reverse electrification. Gas injection ports 60 are formed between plus electrodes 20 and minus electrodes 30. The plus electrodes 20 and the minus electrodes 30 respectively emit plus ions and minus ions toward gas flows from the gas injection ports 60, and the plus ions and minus ions reach the subject to be neutralized at high speed and neutralize the same.

Abstract: To enable accurate detection of ion balance with a simple configuration, thereby enabling small size and reduction of a manufacturing cost, and detection of the ion balance near the surface of an object to be discharged. An ion balance sensor includes an antenna 20 charged with positive ions or negative ions, and a normally-on type MOSFET 11 in which a gate electrode G is connected to the antenna 20, an ion balance-detecting resistance R is connected between a grounded source electrode S and the gate electrode G, and a DC power source VDS and a load resistance RL are serially connected between the source electrode S and a drain electrode D. A voltage of the gate electrode G is changed due to a voltage drop by a current flowing between the charged antenna 20 and an earth via the ion balance-detecting resistance R, and a change of drain current due to the voltage of the gate electrode G is detected, thereby detecting positive and negative balance of ions used for charging the antenna 20.