Abstract: Apparatus and process for fast, quantitative, non-contact topographic investigation of samples. Apparatus includes a light source, and a collimating concave mirror structured and arranged to produce a parallel beam and to direct the parallel beam to a sample to be investigated. A structured mask is located between the light source and the concave mirror, and an image sensor structured and arranged to receive a beam reflected from the sample and the concave mirror. Relative positions of the mask and the sensor to other elements of the apparatus are chosen to provide an essentially sharp image of the mask on the sensor. The instant abstract is neither intended to define the invention disclosed in this specification nor intended to limit the scope of the invention in any way.
Type:
Grant
Filed:
April 1, 2004
Date of Patent:
November 7, 2006
Assignees:
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung E.V., Hungarian Academy of Sciences Research Institute for Technical Physics and Materials Science
Inventors:
István Endre Lukács, János Makai, Lothar Pfitzner, Ferenc Riesz, Béla Szentpali