Abstract: A mechanism for feedthrough of rotary motion to a sealed chamber includes a shaft (220) rotatingly supported inside a hollow housing (200). The shaft (220) comprises a front portion (222), a middle portion (224), and a rear portion (226). The front portion (222) of the shaft protrudes into a sealed external vacuum chamber (202), which is attached to the housing (200). The rear portion (226) of the shaft (220) is eccentric with respect to the rotational axis of the shaft. A cylindrical end (244) of the shaft rotatingly supports a cap (252), which is coaxial with the shaft end (244). The housing (200) and the cap (252) are sealingly and movably connected by a bellows (246). A compensator (250), eccentric with respect to the cap (252) is rotatingly mounted at the periphery of the cap and is fitted into a cavity within an eccentric driver (248), the rotational axis of which is concentric with that of the shaft ( 220).

Abstract: A device for positioning objects within a sealed vacuum chamber (112) comprises a stationay housing (114), which is sealingly attached to the vacuum chamber (112). Located within the housing (114) is a tubular body (158) capable of rotating and translating within the stationary housing (114) through the interaction of an outer magnet (116), which slides and rotates on the surface of the stationary housing, and an inner magnet (118), which is attached to the tubular body (158). A shaft (198) is located inside the tubular body, but cannot be shifted axially with respect to this body. The front end of shaft (198) extends into the vacuum chamber (112) and may carry a specimen or any other object to be treated or tested in the vacuum chamber. The shaft (198) is driven from an external drive mechanism (124). Rotation of the shaft can be converted into opening and closing movements of the jaws (218 and 220).

Abstract: A rotary motion transmitter with an electromagnetic feedthrough device for transmitting rotary motion from the outside to a vacuum chamber (10) designed for treating a specimen in a vacuum environment. The device comprises an evacuated and sealed rotor (14) which contains permanent magnets and, in turn, is hermetically sealed within a capsule (16). The interior of the capsule (16) communicates with the interior of the chamber (10). A removable stator winding unit (22) having electromagnetic windings which interact with the rotor (14) to transmit rotational motion to the rotor is fitted onto the capsule (16). The rotor (14) is rigidly connected to an output shaft (12) which extends into the sealed chamber (10) for supporting and positioning an object to be treated in vacuum. Thus the device combines in itself a rotary feedthrough for transmitting motion to the vacuum chamber (10) and an electric drive motor for positioning an object inside the chamber.

Abstract: A sealer (10) for vacuum containers comprises a valve unit (12) and a removable vacuum-pump head (14). The valve unit consists of a valve housing (24) which can be connected to a vacuum container to be evacuated, for example through a flange (16), and a cylindrical valve element (42) inserted into the valve housing. The valve element has a top transverse opening (46) for interaction with a driving tool, a middle transverse hole (48) for connection to a source of vacuum through the above-mentioned vacuum pump head when the latter is fitted onto the valve element, a bottom transverse hole (52), and an axial bore (50) which connects the middle transverse hole to the bottom transverse hole. The valve element also has a threaded portion (44) which engages an inner thread (36) formed in the valve housing, so that the valve element can be screwed into the valve housing, and can interact with saddle (40) in the valve housing.

Abstract: A sample transfer device (110) for manipulating a sample in a sealed vacuum chamber comprises a tubular housing (112) made from magnetically permeable material. The housing has one end (114) closed and another attached to the vacuum chamber. Located inside the housing is a shaft (116) which is connected to a sample holder. One end of this shaft is connected to a hollow body (140) which is made from a magnetically-permeable and air-tight material. This hollow body (140) forms a sealed cavity which contains an inner permanent magnet (142). The magnet (142) is held in place by two cup-shaped members (152 and 154) and two aluminum blocks (156 and 158). The inner magnet (142) interacts with an outer permanent magnet (166) which slides over the surface of cylindrical housing (112) and moves, through magnetic force, the inner magnet and hence the shaft (116) and the sample holder with the sample in the axial direction of the housing, i.e., into a required position in the vacuum chamber.

Abstract: A device for focusing and positioning a high-energy beam in a vacuum chamber comprises a high-energy beam generator (10), which is sealingly connected to a housing (18) of a high-energy beam generator (20), a focusing unit (12) which consists of two tubular elements (26 and 28) having opposite external threads engageable with inner threads on a sleeve (30), and an adjustable connector unit (14) which is connected at one end to the focusing unit and at the other end to a vacuum chamber (16). Connector unit 14 consists of two skewed rings (60 and 62). One of these rings rotates on the lower end of focusing unit (12), while the other end ring is rotatably installed on the end of vacuum chamber (16). Both rings are rotatably connected to each other by means of a set of balls (68) inserted into a race, which is formed by annular grooves on the mating surfaces of the rings. The ball race between the rings is inclined with respect to the guide element which guides ring (60) during its rotation on the focusing unit.

Abstract: A rotary motion feedthrough mechanism for a sealed chamber comprises a first driven shaft (56) with a through opening (66) and a second driven shaft (96) moveably inserted into the through opening of the first shaft. At its rear end the first driven shaft has a recess (102) which is eccentric and inclined with respect to the axis of rotation of both shafts. The recess rotatingly supports one end of a conical sleeve (110), the other end of which is rotatingly supported in an inclined opening of an external sleeve (68) which is connected to a rotary drive unit through a sprocket (76) installed on the outer surface of the external sleeve. The end of the second drive shaft opposite to the eccentric opening of the first shaft is connected to an independent rotary motion feedthrough mechanism which is capable of transmitting rotation into a sealed space. When the mechanism is sealingly connected, e.g.

Abstract: A rotary motion feedthrough mechanism for an external sealed chamber (206) located outside the mechanism through an inner sealed chamber formed inside the mechanism comprises a first driven shaft (220) with a through opening and a second driven shaft (234) moveably inserted into the through opening of the first shaft. The first shaft (220) carries an eccentric sleeve (242) which is rigidly attached thereto and rotatingly supports on bearings (246 and 248) a cylindrical bushing (244). The bushing (244) in turn supports a cylindrical body (250) which is supported on the bushing by bearings (251 and 253). Cylindrical body (250) is driven into rotation from an external drive means, e.g., manually from a handwheel (266) via a pinion (260) and a gear wheel (256) which is attached to the cylindrical body. Because of eccentricity of the bushing with respect to the axis of rotation of the first shaft (220), the bushing will describe planetary motions with respect to the above-mentioned axis of rotation.

Abstract: A manipulator for vacuum applications, e.g., for positioning of a specimen at a required point in a vacuum chamber (20) where the specimen can be subjected to ion implantation or similar treatment or measuring procedures, comprises an adjustable angular connector (12) which is formed by two skewed rings (32) and (36) which slide one over another. When the rings rotate, the end of drive shaft (72) describes a planetary path along a circle. The drive shaft (72) has one end connected to a rotary drive mechanism (14) and another end to a driven shaft (92) through a universal joint (90). The lower end of the driven shaft is installed in a rotating manner in a slide (87). The slide (87) is guided in one direction along another slide (84) which in turn is guided in a direction perpendicular to the first one along a rigid frame (80). Planetary motion of driven shaft (92) causes linear motions of the slides (84, 87) in mutually perpendicular directions.

Abstract: A valve with improved sealing properties comprises a housing (10a) with an inlet pipe (12a), an outlet pipe (16a) and a flange (54) which is closed by a first cover (52). An annular copper seal (24a) is placed between the flange (54) and the first cover. The first cover is closed with a thrust cover (60) which is connected to the flange by bolts (68) which pass through holes (64) in the first cover and are threaded to the flange. A valve stem (36a), a threaded portion (34a) of which is screwed into a central threaded opening (62), is inserted into the valve housing. The valve stem carries a valve head (38a) which is rotatable with respect to the valve stem and engages a valve seat 48a inside the housing. The threaded connection between the valve stem and the interior of the valve housing is sealed by a bellows (50a).

Abstract: A polar-coordinate manipulator for vacuum application, e.g., for positioning of a specimen (S) between several operating positions in a vacuum chamber (16) where the specimen can be subjected to ion implantation or similar treatment or measuring procedures. The device comprises a circular stationary support (12) attached to the flange of vacuum chamber (16). A square-shaped rotary table (22) is rotatingly supported by a circular support (22) and in turn slidingly supports a sliding block (44). The sliding block can be shifted by a micrometer (50) radially with respect to the axis of rotation of the turntable. The sliding block supports a moveable plate (72) which can be shifted along the above-mentioned axis of rotation and carries a rigidly attached rod (92) which penetrates into the vacuum chamber and supports the sample to be treated. The manipulator can position the sample at a target point in a polar coordinate system.

Abstract: A gate valve for controlling the passage of fluid between inlet and outlet openings comprises a housing (40) containing a reciprocating expandable gate element formed of a wedge (54) which is sandwiched between two spring-loaded plates (56 and 58) so that reciprocation of the wedge causes expansion of the plates for closing the valve's openings. In order to facilitate the return stroke of the wedge and to overcome the holding force of the vacuum on one of the plate, the device includes a bleeder valve element (80) which is connected to the first plate and has a seat on the second plate so that when the first plate (56) located on the higher pressure side commences its movement, it opens the bleeder valve element and equilizes the pressures on both sides of the valve. This eliminates the vacuum and thus the holding force. In the second embodiment, the valve has a time-delay mechanism which delays retraction of the plate on the low pressure side until a certain equilibrium of pressure is achieved.

Abstract: A sample transfer device (10) for manipulating a sample (S) in a pair of sealed vacuum chambers (18, 102) comprises a tubular housing (12) made from a magnetically permeable material. The housing has one closed end (14) and another flanged open end (16) for attachment to the vacuum chamber. Located inside the housing is shaft (40) of a square cross section. One end of the shaft is rotatingly connected to an inner permanent magnet (66) which can rotate with respect to the shaft but moves axially together therewith. The other end of the shaft protrudes from the housing into the vacuum chamber (110). The shaft is supported inside the housing by a bevel gear (32) which rotates in a bearing (20) in the housing. The bevel gear (32) has a square opening (38) which guides the above-mentioned square shaft during its axial movements. The gear (32) engages another gear (98) which is attached to an output shaft of a rotary drive unit (80) having its drive element outside the housing.

Abstract: A feed-through apparatus for use in rotating a shaft which typically forms part of a system. The apparatus includes a feed-through shaft which is to be rotated and structure for rotatably mounting the shaft on a panel or wall. A cap rotatably coupled to the mount has a driver coupled with it, the driver including a stub shaft having bearings at one end thereof received within a groove of an end face of the driven shaft. The driver includes a cylindrical member mounted by a bearing in the inner periphery of the cap, such inner periphery being provided with a beveled surface so that the cylindrical member and the stub shaft wobble when the cap is rotated. When the bearings on the outer end of the stub wobble, they move along a circular path surrounding the central axis of the driven shaft, causing the driven shaft to rotate in the direction of movement of the bearings on the driver.

Abstract: A connector unit for a number of different coupling applications such as for interconnecting a pair of pipes or other structural parts which must be mounted near each other and at an angle with respect to each other. The connector unit includes a pair of side members which are spaced apart and to which are mounted the structural parts to be interconnected. Each side member has a respective ring rotatably mounted thereon by a first set of balls, and the two rings are rotatably coupled to each other by a second set of balls. Each set of balls is in an annular race formed by a pair of mating grooves. The balls of each set are fed into a respective race through a hole in the respective ring, then the hole is plugged to keep the balls in place. The race between the two rings is inclined at an angle relative to the race between each side member and the respective ring.

Abstract: A butterfly valve having a body provided with a fluid passage therethrough. The fluid passage includes a tapered inner surface. A circular valve member is in the housing across the passage and is secured to a shaft rotatable on the housing. One end of the shaft is in a portion of an annular groove in the tapered inner surface, and the other end of the shaft is rotatably mounted in a radial hole by a bearing and projects outwardly from the housing. A knob is on the outer end of the shaft for manual rotation of the shaft. The groove is formed in the body by turning the body on a lathe, thereby requiring only a single hole to be drilled in the body, namely, the hole for receiving the bearing and the adjacent portion of the shaft. Provision of the annular groove eliminates the need for drilling a pair of radial holes on opposite sides of the passage, thereby avoiding misalignment of the shaft.

Abstract: A door for an ultra-high vacuum chamber is disclosed which includes a sealing joint that maintains a hermetic seal when it is baked or otherwise subjected to high temperatures, while yet allowing an operator to have quick access into the interior of the chamber. The quick access door includes a vacuum flange adapted to be conventionally secured to a corresponding flange circumscribing an access port of a vacuum chamber. The door vacuum flange has a conical sealing surface about its inner periphery, and the door includes a sealing disc designed to hermetically mate therewith. That is, the sealing disc has a circumferential conical skirt providing a sealing edge and is mounted on a support arm which is selectively securable across the opening to position the sealing disc in front of the access opening.