Abstract: A power module is adapted to be connected to a voltage source and to supply power to a load. The power module includes a switching bridge that includes a first power transistor and a second power transistor, a first gate controller for driving the first power transistor and a second gate controller for driving the second power transistor. The first gate controller includes a first gate transformer, and a leakage inductance of the first gate transformer forms a resonant circuit with an input capacitance of the first power transistor. The second gate controller includes a second gate transformer, and a leakage inductance of the second gate transformer forms a resonant circuit with an input capacitance of the second power transistor.
Type:
Grant
Filed:
June 15, 2004
Date of Patent:
January 9, 2007
Assignee:
Huttinger Elektronik GmbH + Co. KG
Inventors:
Thomas Kirchmeier, Wolfgang R. H. Oestreicher
Abstract: What is described here is a power supply unit for plasma systems such as plasma processing or coating devices, wherein electric arcs or disruptive breakdown may occur, which originate from an electrode in particular, comprising
a d.c. voltage or direct-current source whose output terminals are connected via an inductive resistor and a power switch to the electrodes of the plasma system, and possibly
a circuit for detecting electric arcs or disruptive breakdown, that operates the switch upon occurrence of an electric arc or disruptive breakdown, in such a way that electrical energy producing a plasma will no longer be applied to the electrodes.
The invention is characterised by the provisions that the inductive resistor(s) is (are) each connected to a recovery diode and that the switch is a series switch.
Type:
Grant
Filed:
April 10, 2001
Date of Patent:
September 16, 2003
Assignee:
Hüttinger Elektronik GmbH & Co. KG
Inventors:
Gerhard Zahringer, Peter Wiedfmuth, Thomas Rettich