Abstract: A highly efficient in-line fluid heater is suitable for heating ultra-pure fluids. Preferably, the heater can be used for heating various fluids, including water, as part of a "wet bench" system used in a wafer processing fabrication facility for the semi-conductor industry. Many other uses for this in-line heater can be envisioned; e.g., water industry, gas processing, and any other use requiring an ultra-clean, highly efficient, non-contact method of raising the temperature of various liquids and gases. The preferred in-line heater utilizes one or more elongated lamps that generate IR radiation as the heating elements. A vessel is provided through which the fluid to be heated is passed. Typically, the vessel is a tube. The tube is preferably a straight single diameter tube, but can be formed in any convenient shape. For ultra-pure fluids, the vessel is formed of an inert or non-reactive material such as quartz. Preferably, the vessel is transparent to the IR radiation generated by the lamps.

Abstract: A filter housing assembly for the filtration of liquids at high temperature and high pressure and for reduction of particles having a housing for a filter cartridge, a flanged cap, that is slidingly inserted into the housing, and having a cap nut for fastening and tightly sealing the cap to a lip on the housing. The interface housing-cap having grooves, with centerlines offset in opposite directions, for receiving sealants and cone-shaped surfaces on the flange and the lip opposing flat surfaces on the cap nut and the flange, respectively, for achieving a tight seal. The housing having a bottom with a concentric cylindrical recess with a concave-convex edge for receiving the nose of the cartridge. The housing also having a spacer for holding the upper part of the cartridge concentric for efficient filtration.

Abstract: A liquid pump is disclosed having a center block containing inlets and outlets for liquid to be pumped and air to operate the pump with associated valves for liquid and air. A pair of opposed cylinders are provided on opposite sides of the center block and each containing a collapsible bellows connected to a sleeve forming a piston with the liquid being pumped in the chamber within the bellows. Push rodes extend from one piston to the other so that the piston pumping liquid out pushes the other piston to fill with liquid. The bellows have conbolutions of selectively varying wall thickness, and tapered single or dual compression seals are provided where the bellows are joined to the center block. An inflow conical valve and an outflow shuttle valve are provided for each cylinder, and vent tubes are provided to cool the bellows and to actuate the air valve at the end of the piston stroke. An encapsulated sheet member is provided in each cylinder.