Abstract: The present invention relates to an inhalation toxicity testing chamber device for nanoparticles having a plurality of concentrations. The present invention provides an inhalation toxicity testing chamber device for nanoparticles having a plurality of concentrations, which: can supply nanoparticles having different concentrations to particle exposure modules by stacking a plurality of particle exposure modules inside a single chamber housing and by allowing each particle exposure module so as to form an independent space from each other; can perform inhalation toxicity testing of nanoparticles having a plurality of concentrations through a single chamber housing by being capable of exposing the test animals put into each particle exposure module to nanoparticles having different concentrations; can easily perform inhalation toxicity tests of nanoparticles in a small scale laboratory etc.

Abstract: A condensation particle counter is capable of efficiently measuring the number and size of fine particles. The condensation particle counter includes a saturator, a plurality of condensers and a plurality of optical particle counters. The saturator is designed to generate a saturated gas by saturating a gas in which fine particles are suspended with working fluid. The condensers are connected to a downstream side of the saturator to condense the saturated gas so that liquid droplets can grow around the fine particles. The optical particle counters are connected to downstream sides of the condensers to optically detect the liquid droplets supplied from the condensers. Each of the condensers has a condenser tube for interconnecting the saturator and each of the optical particle counters. The condenser tube is provided with a hydrophilic tube installed inside surface of the condenser tube.

Abstract: A soft X-ray photoionization charger includes a housing having a chamber and an aperture formed on one side surface of the housing and joined to the chamber. The chamber forms a flow path of an aerosol containing particles. A photoionizer is fixed to the aperture of the housing. The photoionizer includes a head for irradiating soft X-rays into the chamber to neutralize the particles. A transparent window is mounted between the chamber and the head. The transparent window is made of a material permitting passage of the soft X-rays. The photoionization charger further includes a soft support ring arranged around the transparent window and tightly fitted to the aperture.

Abstract: The present invention discloses apparatus and method for rapidly and easily measuring the numbers and size distribution of low concentration particles which exist in a clean space such as a clean room. The apparatus and method according to the present invention measures the numbers of particles by charging particles to a monopolarity, collecting the particles by applying a voltage to an electrode and attaching the charged particles of a certain size or less thereto, separating the charged particles of the certain size or more according to size by the particle separating ducts. The apparatus for measuring the number of particles according to the present invention makes it possible to obtain a size distribution of particles in the air by a single measurement and to rapidly and easily measure it even though the number of the particles in the air is small.

Abstract: Provided is apparatus for controlling flow rate of gases used in semiconductor device by differential pressure by generating differential pressure in a fluid path. A differential pressure generation element generates pressure difference in the fluid path of gases used in semiconductor device fabrication, a pressure, sensor which is installed at a bypass of the fluid path detects the pressure difference, and a central processing unit (CPU) measures and controls a flow rate of the gases, thereby the present invention is capable of controlling the flow rate precisely and rapidly, and enhancing the degree of purity of the gases by the filtering function of the differential pressure generation element itself.

Abstract: The present invention discloses apparatus and method for rapidly and easily measuring the numbers and size distribution of low concentration particles which exist in a clean space such as a clean room. The apparatus and method according to the present invention measures the numbers of particles by charging particles to a monopolarity, collecting the particles by applying a voltage to an electrode and attaching the charged particles of a certain size or less thereto, separating the charged particles of the certain size or more according to size by the particle separating ducts. The apparatus for measuring the number of particles according to the present invention makes it possible to obtain a size distribution of particles in the air by a single measurement and to rapidly and easily measure it even though the number of the particles in the air is small.

Abstract: A condensation particle counter measures the number of ultra-fine particles by growing the ultra-fine particles through a condensing process. The counter includes a capillary in which vapor of operating liquid is condensed and the ultra-fine particles grow. An insulating material surrounds the capillary to shut out heat flow between the capillary and the environment. The condensation particle counter can use various operating liquids including alcohol and water, and can be also applied to semiconductor clean rooms.