Patents Assigned to Hyundai Electronics Industries Co. UT
  • Patent number: 6200821
    Abstract: A method for fabricating a ferroelectric random access memory device, includes the steps of: forming an interlayer insulating layer on a ferroelectric capacitor and a transistor; forming a first opening through the interlayer insulating layer in order to expose a top electrode of the ferroelectric capacitor; forming the barrier metal layer on the resulting structure on which the first opening is formed, wherein the barrier metal layer is in contact with the top electrode of the ferroelectric capacitor; selectively etching the barrier metal and interlayer insulating layers and forming a second opening in order to expose a junction layer of the transistor; forming a polysilicon layer on the resulting structure and doping impurity ions into the polysilicon layer, wherein the doped polysilicon layer is in contact with the junction layer of the transistor; and selectively etching the polysilicon and barrier metal layers, thereby patterning an interconnection layer for interconnecting the transistor and the ferroel
    Type: Grant
    Filed: October 27, 1999
    Date of Patent: March 13, 2001
    Assignee: Hyundai Electronics Industries Co. UT
    Inventor: Yong-Ku Baek