Abstract: Surfaces of fine polystyrene (PS) and polymethyl methacrylate (PMMA) powders were modified by exposure to the downstream products of a nitrogen or oxygen microwave plasma. The effects of nitrogen and indium incorporation in the powder surface were studied with emphasis on variations in the triboelectric properties of the powder. X-ray photoelectron spectroscopy (XPS) was utilized to determine the changes in surface elemental composition. After nitrogen plasma treatment, the C 1s peak profiles suggested the formation of amines in the case of PS, and the formation of imines and amides in the case of PMMA. Oxygen plasma treatment suggested the formation of hydroxyl and carbonyl groups on the surfaces of both PS and PMMA. After treatment with a nitrogen or oxygen plasma, the charge-to-mass ratio (Q/M) of PS and PMMA powders in contact with carrier particles was measured using the cage blowoff method. The surface charge density (Q/A) was calculated from Q/M.