Abstract: An etching gas mixture includes a nitrogen-containing compound and an inert gas. To manufacture an integrated circuit (IC) device, a silicon-containing film on a substrate is etched by using plasma generated from the etching gas mixture, and thus a hole is formed in the silicon-containing film. The nitrogen-containing compound is selected from a compound represented by Formula 1 and a compound represented by Formula 2: (R1)C?N ??[Formula 1] wherein in Formula 1, R1 is a C2 to C3 linear or branched perfluoroalkyl group, (R2)(R3)C?NH ??[Formula 2] wherein in Formula 2, each of R2 and R3 is independently a C1 to C2 linear perfluoroalkyl group.

Abstract: A process and a plant are proposed for producing a synthesis gas including hydrogen and carbon oxides by partial oxidation of carbon-containing fuel in the presence of an oxygen-containing oxidant and a moderator, wherein the obtained raw synthesis gas is laden with soot particles. According to the invention the cooling of the raw synthesis gas is carried out using a crossflow heat exchanger, a shell and tube heat exchanger or a spiral heat exchanger, wherein the carbon-containing input stream or the oxidant stream or the moderator stream or a plurality of these streams serve as the first coolant and are thus preheated before introduction into the partial oxidation plant.

Abstract: The invention provides a scrubbing column for cleaning gas streams laden with absorbent residues, for example with methanol, and also with solid particles, for example with fuel dust. The gas scrubbing is effected by means of a random packing disposed in the lower region of the scrubbing column and the gas scrubbing of the gas stream laden solely with absorbent residues but not with solid particles by means of a structured packing disposed in the upper region of the scrubbing column. The use of the scrubbing column according to the invention in the integrated plant system between a gasification plant and a plant for gas scrubbing which is operated by the Rectisol process, for example, offers particular advantages with regard to its industrial employability owing to the possible connections described, which bring synergies for efficient operation of the integrated plant system.

Abstract: The invention provides a method for on-site monitoring of the quality of the gases delivered to a consumer site, the monitoring being carried out during the delivery, in order to declare the delivery compliant or non-compliant with specifications, being characterized in that, during the delivery, a monitoring of the gas(es) delivered is carried out by the thermal conductivity technique.

Abstract: The invention relates to a process and a plant for producing methanol from an input gas including carbon monoxide and hydrogen using a pre-reactor stage and a main reactor stage. Input gas produced at and under elevated pressure is initially introduced into a pre-reactor stage for catalytic conversion into a first methanol-containing product stream. After separation of methanol from the first methanol-containing product stream and discharging from the pre-reactor stage a remaining gas stream is introduced into a main reactor stage as a residual gas stream after compression to reaction pressure for catalytic conversion into a second methanol-containing product stream, After separation from the second methanol-containing product stream methanol is discharged from the main reactor stage. Using an input gas having a carbon monoxide content of 25% to 36% by volume results in large savings in respect of the compressor output required for the production process.

Abstract: An oxyacetylene type work apparatus including a first container containing acetylene; a first pressure gauge configured to measure the pressure in the first container, a first two-dimensional marking disposed on the first dial, a second container containing oxygen; a second pressure gauge configured to measure the pressure in the second container, a second two-dimensional marking disposed on the second dial, an image capturing device configured to produce images of the first pressure gauge and of the second pressure gauge; an electronic logic circuit configured to process said images of the first and second pressure gauges thereby determining the respective angular positions, and a sensor configured to measure the temperature of the first acetylene container.

Abstract: Disclosed are Group 6 film forming compositions comprising Group 6 transition metal-containing precursors selected from the group consisting of: M(=O)2(OR)2??Formula I, M(=O)(NR2)4??Formula II, M(=O)2(NR2)2??Formula III, M(=NR)2(OR)2??Formula IV, and M(=O)(OR)4??Formula V, wherein M is Mo or W and each R is independently H, a C1 to C6 alkyl group, or SiR?3, wherein R? is H or a C1 to C6 alkyl group. Also disclosed are methods of synthesizing and using the disclosed compositions to deposit Group 6 transition metal-containing films on substrates via vapor deposition processes.

Abstract: A method for storing and distributing liquefied hydrogen using an installation having a storage facility for liquid hydrogen, a source of gaseous hydrogen, a liquefier having an inlet connected to the source and an outlet connected to the liquid hydrogen storage facility, the storage facility having a liquid withdrawal pipe having an end connected to the liquid hydrogen storage facility and an end configured to be connected to at least one mobile tank, the method having a stage of liquefying gaseous hydrogen and a stage of transferring the liquefied hydrogen to the storage facility, wherein the liquefied hydrogen has a temperature below the bubble point of hydrogen at the storage pressure and further having a stage of transfer of liquid hydrogen directly to the tank at a temperature between the saturation temperature at the pressure of the liquid and a temperature above the solidification temperature of the hydrogen.

Abstract: The invention relates to a process for producing methanol and to a plant for producing methanol. A first fresh gas suitable for production of methanol and having a high carbon dioxide content is pre-compressed by a first compressor stage to obtain a second fresh gas. The second fresh gas is merged with a recycle gas stream and further compressed to synthesis pressure in a second compressor stage. Catalytic conversion of the thus obtained synthesis gas stream in a plurality of serially arranged reactor stages with intermediate condensation and separation of the crude methanol reduces the recycle gas amount in the synthesis circuit to such an extent that recycle gas may be directly recycled to the second fresh gas stream, thus ensuring that no recycle gas compressor stage is required and that the total compressor power may be reduced.

Abstract: Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.

Abstract: Heat exchanger presenting a first gas flow path containing a heat-regenerative packing and a separate second gas flow path containing a heat-conductive packing and use of same for heating a gas to be heated by means of heat recovered from a hot gas in a two-phase alternating heat-recovery process.

Abstract: A process for establishing vacuum insulation under cryogenic condition and an apparatus compatible with such process are described. When an insulation enclosure filled with high purity CO2 is evacuated to around 100 absolute Pa at ambient temperature, hard vacuum of below 1 absolute Pa may be automatically obtained within the insulation enclosure when temperature drops to around or below ?170° C. This process can be employed to provide vacuum insulation for cold box housing air separation units operated under cryogenic condition.

Abstract: Method and plant for generation of synthesis gas, comprising the steps of air fractionation to give oxygen, nitrogen and tail gas, gasification of a hydrocarbonaceous fuel to give crude synthesis gas and cleaning of the crude synthesis gas by removal of acid gas by means of cryogenic absorption, wherein the absorbent is cooled by means of a compression coolant circuit and the cooling water used is cooled by evaporative cooling by means of the tail gas obtained in the air fractionation.

Abstract: According to an embodiment of the invention, nitrogen gas of an air separation unit is used to cool the gas formed in a reservoir of liquid from an MEOH unit that is supplied with oxygen by said air separation unit.

Abstract: Disclosed are a cold box structure with cold box panels partly built-in and an installation method therefor. The cold box structure is mainly applied to plate-fin heat exchangers, and in particular to high-pressure aluminum plate-fin heat exchangers. The cold box structure comprises a base, a cold box support frame, four cold box panels, and a cold box top plate, and a plate-fin heat exchanger is placed inside the cold box. Some of or all the four cold box panels can be placed inside the cold box support frame as needed. The cold box structure can protect the cold box support frame from being damaged by cryogenic steam ejected from the plate fin-heat exchanger due to leakage, and further enables the discovering of leakage situations of the plate-fin heat exchanger from outer surfaces of the cold box panels in a timely manner.

Abstract: A facility and method for membrane permeation treatment of a feed gas flow containing at least methane and carbon dioxide that includes a compressor, a pressure measurement device, at least one valve, and first, second, third, and fourth membrane separation units for separation of CO2 from CH4 to permeates enriched in CO2 and retentates enriched in CH4, respectively. The at least one valve adjusts the number of membranes combined and connected to the flow of gas entering into at least one of the membrane separation units as a function of the pressure recorded by the pressure measurement device.

Abstract: Method for indirectly preheating a fluid upstream of a furnace, wherein the fluid is preheated by indirect heat exchange with fumes discharged from the furnace through a medium in a chamber, and wherein the flow rate of the medium in the chamber is adjusted on the basis of at least one of the following temperatures: the temperature of the discharged fumes, the temperature of the medium in the chamber, the temperature of the preheated fluid, and the temperature of the wall separating the discharged fumes from the medium in the chamber.

Abstract: The invention relates to a process and an apparatus for producing an olefin-containing feed stream for a steam reforming plant. According to the invention, the olefin-containing hydrocarbon starting material is for this purpose heated, vaporized and catalytically hydrogenated. The hydrogenation product stream obtained is separated in a separation apparatus into a gaseous reforming feed stream, which is fed to a steam reforming plant, and a gaseous recycle stream. Here, the entry temperature of the hydrogenation input stream into the hydrogenation reactor is regulated via the degree to which it is heated and/or via the size of the recycle stream. Safe operation of the hydrogenation reactor over a wide range of olefin contents in the hydrocarbon feed is made possible in this way.

Abstract: In a process for the combined production of a) a hydrogen-enriched gas and a carbon monoxide-enriched gas and/or b) a mixture of hydrogen and carbon monoxide by cryogenic distillation and scrubbing, a still liquor is extracted from a scrubbing column and sent to a stripping column, a still liquor is extracted from the stripping column and sent to a separating column for carbon monoxide and methane and a cooling fluid is used at a pressure greater than that of the head of the separating column for cooling at least one fluid extracted at an intermediate level from the scrubbing column.

Abstract: The present invention relates to a skid-mounted cold box and its prefabricated structure and assembly method. Each prefabricated structure includes a framework and a first panel that is used to enclose sides of the framework. Ring beams of two adjacent prefabricated structures are connected through bolts on site. A second panel connected through bolts encloses the gap between ring beams of the two adjacent prefabricated structures from sides. The present invention cancels all field welding seams and omits the field welding and nondestructive testing operations. The crane can be dismissed after the upper prefabricated structure of the cold box is lifted into place and bolts corresponding to columns on ring beams are connected. The present invention guarantees the connection strength of steel structures relying on bolt-based connection between ring beams and the second panel connected through bolts guarantees the airtightness of the cold box. This effectively reduces field assembly work and saves time and cost.