Abstract: A wavelength selector (5) selects a wavelength of a broadband light source (4). A light director (BS1, BS2) directs light from the wavelength selector along a measurement path towards a region of a sample surface and along a reference path towards a reference surface, such that light reflected by the region of the sample surface and light reflected by the reference surface interfere to produce an interferogram. A controller (20) controls the wavelength selector to change the wavelength selected by the wavelength selector. A recorder (63) records successive images, each image representing the interferogram produced by a respective one of the wavelengths selected by the wavelength selector. A data processor (18, 180) processes the recorded images to produce at least one of a surface profile and a surface height map of at least a part of the sample surface. The reference path may be controlled to compensate for environmental effects such as vibration, thermal effects and air turbulence.

Abstract: The present invention relates to a three-dimensional measuring assembly for determining the relative position of components, such as machine parts and/or instruments. The invention also relates to a method for determining the relative position of components, such as more particularly machine parts, using a reference member according to any of the foregoing claims.

Abstract: The present invention relates to a three-dimensional measuring assembly for determining the relative position of components, such as machine parts and/or instruments. The invention also relates to a method for determining the relative position of components, such as more particularly machine parts, using a reference member according to any of the foregoing claims.